FIELD EMISSION DEVICE

• US 20110285271A1
• Filed: 12/03/2010
• Published: 11/24/2011
• Est. Priority Date: 05/20/2010
• Status: Active Grant

• Current Assignee: Hon Hai Precision Industry Co., Ltd., Tsinghua University
• Original Assignee: Hon Hai Precision Industry Co., Ltd., Tsinghua University
• Inventors: FAN, SHOU-SHAN, DU, BING-CHU, LIU, PENG, ZHOU, DUAN-LIANG, CHEN, PI-JIN, HU, ZHAO-FU, GUO, CAI-LIN
• Granted Patent: US 8,237,347 B2
• Time in Patent Office: Days
• US Class Current: 313/310
• CPC Class Codes: H01J 2201/30469 Carbon nanotubes (CNTs)
• CPC Class Codes: H01J 2203/0204 using cold cathodes, e.g. field emission cathodes
• CPC Class Codes: H01J 2329/0455 Carbon nanotubes (CNTs)
• CPC Class Codes: H01J 2329/46 Arrangements of electrodes and associated parts for generating or controlling the electron beams
• CPC Class Codes: H01J 29/481 Electron guns using field-emission, photo-emission, or secondary-emission electron source
• CPC Class Codes: H01J 3/021 Electron guns using a field emission, photo emission, or secondary emission electron source
• CPC Class Codes: H01J 31/127 using large area or array sources, i.e. essentially a source for each pixel group
• CPC Class Codes: H01J 9/148 of electron emission flat panels, e.g. gate electrodes, focusing electrodes or anode electrodes

Abstract

A field emission device includes an insulative substrate, an electron pulling electrode, a secondary electron emission layer, a first dielectric layer, a cathode electrode, and an electron emission layer. The electron pulling electrode is located on a surface of the insulative substrate. The secondary electron emission layer is located on a surface of the electron pulling electrode. The cathode electrode is located apart from the electron pulling electrode by the first dielectric layer. The cathode electrode has a surface oriented to the electron pulling electrode and defines a first opening as an electron output portion. The electron emission layer is located on the surface of the cathode electrode and oriented to the electron pulling electrode.

Claims

1. A field emission device, comprising:

an insulative substrate;

an electron pulling electrode located on a surface of the insulative substrate;

a secondary electron emission layer located on a surface of the electron pulling electrode;

a first dielectric layer;

a cathode electrode located apart from the electron pulling electrode by the first dielectric layer, wherein the electron pulling electrode is located between the insulative substrate and the cathode electrode, the cathode electrode has a surface oriented to the electron pulling electrode, and the cathode electrode has a first opening; and

an electron emission layer located on the surface of the cathode electrode oriented to the electron pulling electrode.

2. The field emission device of claim 1, wherein the cathode electrode comprises a plurality of strip-shaped structures spaced from each other, and the first opening is defined between adjacent two strip-shaped structures.

3. The field emission device of claim 1, wherein the first dielectric layer has a second opening;

the first opening and the second opening have at least one part overlapping.

4. The field emission device of claim 1, wherein at least part of the electron emission layer is oriented to the secondary electron emission layer.

5. The field emission device of claim 1, wherein the electron emission layer comprises a plurality of electron emitters;

the plurality of electron emitters are carbon nanotubes, carbon nanofibres, silicon nanowires, or combinations thereof.

6. The field emission device of claim 5, wherein each of the plurality of electron emitters has an electron emission tip pointing to the secondary electron emission layer.

7. The field emission device of claim 6, wherein the secondary electron emission layer has a first bulge on a top surface;

the cathode electrode has a second bulge on a bottom surface;

the electron emission layer is located on a surface of the second bulge; and

the electron emission tips point at a surface of the first bulge.

8. The field emission device of claim 6, wherein a distance between the electron emission tips and the secondary electron emission layer is less than a mean free path of gas molecules and free electrons.

9. The field emission device of claim 8, wherein the distance between the electron emission tips and the secondary electron emission layer ranges from about 10 micrometers to about 30 micrometers.

10. The field emission device of claim 3, further comprising a gate electrode, wherein the gate electrode is located apart from and insulated from the cathode electrode by a second dielectric layer.

11. The field emission device of claim 10, wherein the gate electrode is a metal mesh coated with a secondary electron emission material.

12. The field emission device of claim 10, wherein the second dielectric layer has a third opening in alignment with the first and second openings;

the first, second and third openings cooperatively define an electron outputting portion;

an inner surface of the third opening is coated with a secondary electron emission material.

13. The field emission device of claim 12, wherein a thickness of the second dielectric layer is greater than 500 micrometers;

and a size of the third opening gradually decreases along a direction apart from the secondary electron emission layer.

14. The field emission device of claim 10, further comprising a secondary electron enhancing electrode located between the second dielectric layer and the gate electrode and insulated from the gate electrode by a third dielectric layer;

the secondary electron enhancing electrode has a fourth opening;

an inner surface of the fourth opening is coated with a secondary electron emission material.

15. The field emission device of claim 14, wherein the inner surface of the fourth opening is a curved surface or has concave-convex structure thereon.

16. The field emission device of claim 1, further comprising an anode located above the cathode electrode;

the cathode electrode is located between the anode and the electron pulling electrode.

17. A field emission device, comprising:

an insulative substrate;

a first dielectric layer located on a surface of the insulative substrate and defining a second opening to expose part of the surface of the insulative substrate;

an electron pulling electrode located on an exposed surface of the insulative substrate;

a secondary electron emission layer located on a surface of the electron pulling electrode;

a cathode electrode located on a surface of the first dielectric layer and extending to above the secondary electron emission layer, wherein the cathode electrode has a surface oriented to the electron pulling electrode and defines a first opening as an electron outputting portion;

an electron emission layer located on the surface of the cathode electrode, wherein the electron emission layer is oriented to and spaced from the secondary electron emission layer;

a gate electrode located above and insulated from the cathode electrode by a second dielectric layer; and

an anode located above the gate electrode.

18. The field emission device of claim 17, wherein a voltage supplied to the electron pulling electrode is higher than a voltage supplied to the cathode electrode;

a voltage supplied to the gate electrode is higher than the voltage of the electron pulling electrode; and

a voltage supplied to the anode is higher than the voltage of the gate electrode.

19. A field emission device, comprising:

an insulative substrate;

a first dielectric layer located on a surface of the insulative substrate and defining a second opening to expose part of the surface of the insulative substrate;

an electron pulling electrode located on an exposed surface of the insulative substrate;

a secondary electron emission layer located on a surface of the electron pulling electrode;

a cathode electrode located on a surface of the first dielectric layer and extending to above the secondary electron emission layer, wherein the cathode electrode has a surface oriented to the electron pulling electrode and defines a first opening as an electron outputting portion; and

an electron emission layer located on the surface of the cathode electrode, wherein the electron emission layer comprises a plurality of electron emitters;

each of the plurality of electron emitters has an electron emission tip pointing at the secondary electron emission layer.

20. The field emission device of claim 19, wherein a distance between the electron emission tip and the secondary electron emission layer is less than a mean free path of gas molecules and free electrons.