DRIVE LOOP FOR MEMS OSCILLATOR
First Claim
Patent Images
1. A method for controlling a MEMS device, comprising:
- generating a current according to a movement of the MEMS device;
the movement is controlled by a control signal;
generating a peak voltage according to the current; and
adjusting the control signal when the peak voltage is out of a predetermined range.
1 Assignment
0 Petitions
Accused Products
Abstract
Some embodiments regard a method comprising: generating a current according to a movement of the MEMS device; the movement is controlled by a control signal; generating a peak voltage according to the current; and adjusting the control signal when the peak voltage is out of a predetermined range.
36 Citations
20 Claims
-
1. A method for controlling a MEMS device, comprising:
-
generating a current according to a movement of the MEMS device;
the movement is controlled by a control signal;generating a peak voltage according to the current; and adjusting the control signal when the peak voltage is out of a predetermined range. - View Dependent Claims (2, 3, 4, 5, 6, 7)
-
-
8. A MEMS circuit comprising:
-
a MEMS oscillator configured to generate a current; a current-to-voltage converter configured to convert the current to a first voltage. an amplifier configured to convert the first voltage to a second voltage; a voltage peak detector configured to generate a voltage peak of the second voltage; a calibrating circuit configured to receive the voltage peak and generate a calibrating circuit signal; a voltage generating circuit configured to generate a third voltage based on the calibrating circuit signal; and a driver configured to receive the second voltage as an input and the third voltage as an operation voltage and generate a fourth voltage for use by the MEMS oscillator. - View Dependent Claims (9, 10, 11, 12, 13, 14)
-
-
15. A circuit comprising:
-
a node having a first voltage; a voltage peak detector coupled to the first node and configured to generate a voltage peak of the first voltage; a comparator configured to generate a compare-result signal based on the voltage peak, a first reference voltage, and a second reference voltage; a state machine configured to generate a state machine signal based on the compare-result signal; a voltage generating circuit configured to generate a second voltage based on the state machine signal, a voltage level of the second voltage, and a third reference voltage; and a driver coupled to the first node and configured to receive the first voltage as an input and the second voltage as an operation voltage and generate a third voltage for use by an oscillating circuit;
a voltage level of the first voltage corresponding to a voltage level of the third voltage via a feedback loop. - View Dependent Claims (16, 17, 18, 19, 20)
-
Specification