PATTERNING METHOD
First Claim
1. A patterning method, comprising:
- forming a mask layer and a patterned photoresist layer on a target layer in sequence, wherein an etching rate of the mask layer is different from an etching rate of the target layer;
forming a plurality of spacers on sidewalls of the patterned photoresist layer respectively, wherein an etching rate of the spacers is different from the etching rate of the mask layer;
removing the patterned photoresist layer to form an opening between any two adjacent spacers;
removing a portion of the mask layer by using the spacers as a mask so as to form a patterned mask layer; and
removing a portion of the target layer by using the patterned mask layer as a mask.
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Abstract
A patterning method of the present invention is described as follows. A mask layer and a patterned photoresist layer are formed on a target layer in sequence, wherein an etching rate of the mask layer is different from an etching rate of the target layer. A plurality of spacers is formed on sidewalls of the patterned photoresist layer respectively, wherein an etching rate of the spacers is different from the etching rate of the mask layer. The patterned photoresist layer is removed to form an opening between any two adjacent spacers. A portion of the mask layer is removed by using the spacers as a mask so as to form a patterned mask layer. A portion of the target layer is removed by using the patterned mask layer as a mask.
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Citations
15 Claims
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1. A patterning method, comprising:
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forming a mask layer and a patterned photoresist layer on a target layer in sequence, wherein an etching rate of the mask layer is different from an etching rate of the target layer; forming a plurality of spacers on sidewalls of the patterned photoresist layer respectively, wherein an etching rate of the spacers is different from the etching rate of the mask layer; removing the patterned photoresist layer to form an opening between any two adjacent spacers; removing a portion of the mask layer by using the spacers as a mask so as to form a patterned mask layer; and removing a portion of the target layer by using the patterned mask layer as a mask. - View Dependent Claims (2, 3, 4, 5, 6, 7)
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8. A patterning method, comprising:
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forming a mask layer and a patterned photoresist layer on a target layer in sequence, wherein the mask layer comprises a carbon-containing material layer or a photoresist layer; forming a plurality of spacers on sidewalls of the patterned photoresist layer respectively; removing the patterned photoresist layer to form an opening between any two adjacent spacers; removing a portion of the mask layer by using the spacers as a mask so as to form a patterned mask layer; and removing a portion of the target layer by using the patterned mask layer as a mask. - View Dependent Claims (9, 10, 11, 12, 13, 14, 15)
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Specification