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PATTERNING METHOD

  • US 20110294075A1
  • Filed: 05/25/2010
  • Published: 12/01/2011
  • Est. Priority Date: 05/25/2010
  • Status: Abandoned Application
First Claim
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1. A patterning method, comprising:

  • forming a mask layer and a patterned photoresist layer on a target layer in sequence, wherein an etching rate of the mask layer is different from an etching rate of the target layer;

    forming a plurality of spacers on sidewalls of the patterned photoresist layer respectively, wherein an etching rate of the spacers is different from the etching rate of the mask layer;

    removing the patterned photoresist layer to form an opening between any two adjacent spacers;

    removing a portion of the mask layer by using the spacers as a mask so as to form a patterned mask layer; and

    removing a portion of the target layer by using the patterned mask layer as a mask.

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