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SEMICONDUCTOR DEVICE AND METHOD OF MANUFACTURING THE SAME

  • US 20110294291A1
  • Filed: 02/25/2011
  • Published: 12/01/2011
  • Est. Priority Date: 05/28/2010
  • Status: Abandoned Application
First Claim
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1. A semiconductor device comprising:

  • a switch in a surface area of a semiconductor substrate;

    a contact plug with an upper surface and a lower surface, the lower surface connected to the switch, the upper surface having a roughness of 0.2 nm or less; and

    a functional element on the upper surface of the contact plug.

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