ACCELEROMETER
First Claim
1. An accelerometer comprising:
- a substrate define a stationary electrode thereon,a first moveable mass defining a conductive-layer thereon facing the stationary electrode;
a plurality of first elastic elements coupled with a peripheral side of the first moveable mass;
a first fixed element surrounding the first moveable mass, coupled with the first elastic elements and fixedly attached to the substrate;
a plurality of first fixed electrodes extending outwardly from the first fixed element;
a second moveable mass surrounding the first fixed electrodes;
a plurality of first moveable electrodes extending inwardly from the second moveable mass toward the first fixed element and parallel to the first fixed electrodes, respectively;
a plurality of second elastic elements coupled with a peripheral side of the second moveable mass;
and a second fixed element surrounding the second moveable mass, coupled with the second elastic element and fixedly attached to the substrate.
2 Assignments
0 Petitions
Accused Products
Abstract
A accelerometer includes a substrate define a stationary electrode thereon, a first moveable mass defining a conductive-layer thereon facing the stationary electrode, a plurality of first elastic elements coupled with a peripheral side of the first moveable mass, a first fixed element surrounding the first moveable mass and fixedly attached to the substrate, a plurality of first fixed electrodes extending outwardly from the first fixed element, a second moveable mass surrounding the first fixed electrodes, a plurality of first moveable electrodes extending inwardly from the second moveable mass toward the first fixed to element and parallel to the first fixed electrodes, respectively, a plurality of second elastic elements coupled with a peripheral side of the second moveable mass, and a second fixed element surrounding the second moveable mass and fixedly attached to the substrate.
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Citations
4 Claims
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1. An accelerometer comprising:
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a substrate define a stationary electrode thereon, a first moveable mass defining a conductive-layer thereon facing the stationary electrode; a plurality of first elastic elements coupled with a peripheral side of the first moveable mass; a first fixed element surrounding the first moveable mass, coupled with the first elastic elements and fixedly attached to the substrate; a plurality of first fixed electrodes extending outwardly from the first fixed element; a second moveable mass surrounding the first fixed electrodes; a plurality of first moveable electrodes extending inwardly from the second moveable mass toward the first fixed element and parallel to the first fixed electrodes, respectively; a plurality of second elastic elements coupled with a peripheral side of the second moveable mass; and a second fixed element surrounding the second moveable mass, coupled with the second elastic element and fixedly attached to the substrate. - View Dependent Claims (2, 3)
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4. A tri-axis accelerometer, comprising:
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a substrate surrounding by a first frame, and including a first conductive-layer thereon; a first moveable mass connected to the first frame by a plurality of first elastic members and being capable of moving along both directions parallel and perpendicular to the substrate; a plurality of first moveable electrodes extending from an inner side of the first moveable mass; is a second frame surrounded by the first moveable electrodes, the second frame defining a plurality of first fixed electrodes extending from an outer side of the second frame toward the first moveable mass; each of the first fixed electrode being located between two adjacent first moveable electrodes, and each of the first moveable electrodes being located between two adjacent fixed electrodes; a second moveable mass surrounded by the second frame and connected to the second frame by a plurality of second elastic members, the second moveable mass being capable of moving a direction perpendicular to the substrate, the second moveable mass defining a second conductive-layer facing the first conductive-layer on the substrate;
whereinthe first fixed electrodes and the first moveable electrodes form a comb capacitor having variable capacitance according to variable overlapped area therebetween; and the first conductive-layer and the second conductive-layer form a plate capacitor having variable capacitance according to variable distance therebetween.
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Specification