MIRROR ANGULAR-POSITIONING APPARATUS AND PROCESSING APPARATUS
First Claim
1. An apparatus for angular positioning of a mirror, the apparatus comprising:
- a first mirror;
a first motor configured to rotate the first mirror;
a first detector configured to detect a rotational angle of the first mirror;
a first controller configured to supply an electric current to the first motor so that the rotational angle of the first mirror reaches a target angle, to estimate, based on a model representing a relation between a value of the electric current to be supplied to the first motor and a face tangle error angle of the first mirror, a face tangle error angle of the first mirror in a case where the electric current is supplied to the first motor, and to, if the estimated angle exceeds a tolerance, perform a process of adjusting of a supply of the electric current to the first motor so that the face tangle error angle of the first mirror falls within the tolerance.
1 Assignment
0 Petitions
Accused Products
Abstract
The present invention provides an apparatus for angular positioning of a mirror, the apparatus including a motor configured to rotate a mirror, a detector configured to detect a rotational angle of the mirror, a controller configured to supply an electric current to the motor so that the rotational angle of the mirror reaches a target angle, to estimate, based on a model representing a relation between a value of the electric current to be supplied to the motor and a face tangle error angle of the mirror, a face tangle error angle of the mirror to which the electric current is supplied, and to, if the estimated angle exceeds a tolerance, perform a process of adjusting of a supply of the electric current to the motor so that the face tangle error angle of the mirror falls within the tolerance.
-
Citations
6 Claims
-
1. An apparatus for angular positioning of a mirror, the apparatus comprising:
-
a first mirror; a first motor configured to rotate the first mirror; a first detector configured to detect a rotational angle of the first mirror; a first controller configured to supply an electric current to the first motor so that the rotational angle of the first mirror reaches a target angle, to estimate, based on a model representing a relation between a value of the electric current to be supplied to the first motor and a face tangle error angle of the first mirror, a face tangle error angle of the first mirror in a case where the electric current is supplied to the first motor, and to, if the estimated angle exceeds a tolerance, perform a process of adjusting of a supply of the electric current to the first motor so that the face tangle error angle of the first mirror falls within the tolerance. - View Dependent Claims (2, 3, 4, 5)
-
-
6. A processing apparatus for irradiating an object with a laser light, the processing apparatus comprising:
-
an apparatus for angular positioning of a mirror; and an irradiation unit configured to irradiate the mirror with the laser light, wherein the apparatus for angular positioning of a mirror comprises; a mirror; a motor configured to rotate the mirror; a detector configured to detect a rotational angle of the mirror; and a controller configured to supply an electric current to the motor so that the rotational angle of the mirror reaches a target angle, to estimate, based on a model representing a relation between a value of the electric current to be supplied to the motor and a face tangle error angle of the mirror, a face tangle error angle of the mirror in a case where the electric current is supplied to the motor, and to, if the estimated angle exceeds a tolerance, cause the irradiation unit to wait for irradiating of the apparatus with the laser light.
-
Specification