Optical image stabilizer and method of manufacturing the same
First Claim
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1. An optical image stabilizer, comprising:
- a substrate;
a table disposed over the substrate, while levitating, to be movable on the substrate and having an image sensor mounted on the upper end of the substrate;
cantilever arms disposed over the substrate, while levitating, and connected to the table to move the table;
anchors fixing one ends of the cantilever arms onto the substrate; and
electrodes applying voltage for moving the cantilever arms.
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Abstract
Disclosed herein is an optical image stabilizer, including: a substrate; a table disposed over the substrate, while levitating, to be movable on the substrate and having an image sensor mounted on the upper end of the substrate; cantilever arms disposed over the substrate, while levitating, and connected to the table to move the table; anchors fixing one ends of the cantilever arms onto the substrate; and electrodes applying voltage for moving the cantilever arm.
17 Citations
14 Claims
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1. An optical image stabilizer, comprising:
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a substrate; a table disposed over the substrate, while levitating, to be movable on the substrate and having an image sensor mounted on the upper end of the substrate; cantilever arms disposed over the substrate, while levitating, and connected to the table to move the table; anchors fixing one ends of the cantilever arms onto the substrate; and electrodes applying voltage for moving the cantilever arms. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11)
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12. A method of manufacturing an optical image stabilizer, comprising:
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providing an SOI substrate that includes first and second silicon each provided on the upper surface and the lower surface of the substrate, having an insulator layer therebetween; forming a table, a cantilever arm connected to the table, an anchor connected to the cantilever arm, and an electrode opposite to the cantilever arm by etching the first silicon; allowing the table and the cantilever arm to levitate from the second silicon by removing an insulator layer disposed under the table and the cantilever arm; and mounting an image sensor on the table. - View Dependent Claims (13, 14)
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Specification