GRAPHENE NANO RIBBONS AND METHODS OF PREPARING THE SAME

• US 20110300338A1
• Filed: 06/06/2011
• Published: 12/08/2011
• Est. Priority Date: 06/04/2010
• Status: Active Grant

• Current Assignee: Samsung Electronics Co. Ltd.
• Original Assignee: Samsung Electronics Co. Ltd.
• Inventors: Shin, Hyeon-jin, Choi, Jae-young, Lee, Young-hee, Han, Gang-hee
• Granted Patent: US 8,968,587 B2
• Time in Patent Office: Days
• US Class Current: 428/156
• CPC Class Codes: B82Y 30/00 Nanotechnology for materials or surface science, e.g. nanocomposites
• CPC Class Codes: B82Y 40/00 Manufacture or treatment of nanostructures
• CPC Class Codes: C01B 2204/06 Graphene nanoribbons
• CPC Class Codes: C01B 32/184 Preparation
• CPC Class Codes: C01B 32/194 After-treatment
• CPC Class Codes: H01L 29/66742 Thin film unipolar transistors
• CPC Class Codes: H01L 29/78684 having a semiconductor body comprising semiconductor materials of Group IV not being silicon, or alloys including an element of the group IV, e.g. Ge, SiN alloys, SiC alloys H01L29/7869 takes precedence
• CPC Class Codes: H01M 10/052 Li-accumulators
• CPC Class Codes: H01M 4/1393 of electrodes based on carbonaceous material, e.g. graphite-intercalation compounds or CFx
• CPC Class Codes: H01M 4/8817 Treatment of supports before application of the catalytic active composition coated porous composites H01M8/0245
• CPC Class Codes: H01M 4/8867 Vapour deposition
• CPC Class Codes: H01M 8/0202 Collectors; Separators, e.g. bipolar separators; Interconnectors
• CPC Class Codes: H10K 71/221 by lift-off techniques
• CPC Class Codes: Y02E 60/10 Energy storage using batteries
• CPC Class Codes: Y02E 60/50 Fuel cells
• CPC Class Codes: Y02P 70/50 Manufacturing or production processes characterised by the final manufactured product
• CPC Class Codes: Y10T 428/24479 including variation in thickness

Abstract

Methods of preparing graphene nano ribbons may include forming a graphene sheet on at least one surface of a substrate, forming a plasma mask having a nano pattern on the graphene sheet, and forming a nano pattern on the graphene sheet by plasma treating a stack structure on which the plasma mask is formed.

Claims

1. A method of preparing a graphene nano ribbon, the method comprising:

depositing a graphene sheet on at least one surface of a substrate;

forming a plasma mask with a nano pattern on the graphene sheet; and

forming a nano pattern in the graphene sheet by plasma treating a stack structure including the plasma mask.

2. The method of claim 1, wherein the forming of the plasma mask includes

stacking amorphous carbon on the graphene sheet;

and

forming a nano pattern in the amorphous carbon by irradiating the amorphous carbon with light.

3. The method of claim 1, further comprising:

removing the plasma mask after the forming of the nano pattern.

4. The method of claim 3, wherein the removing of the plasma mask includes thermally treating the stack structure including the plasma mask for about 10 minutes to about 5 hours at about 400-1200°

C. in an atmosphere including at least one of O₂, H₂, CH₄, C₂H₄, and C₂H₂.

5. The method of claim 1, wherein the graphene sheet includes 1-10 layers of graphene.

6. The method of claim 1, wherein the graphene sheet includes one of 1 and 2 layers of graphene.

7. The method of claim 2, wherein the light irradiation of the amorphous carbon includes laser light irradiation.

8. The method of claim 1, wherein the forming of the nano pattern includes controlling an intensity of the plasma based on a thickness of the graphene sheet.

9. The method of claim 1, wherein the substrate includes at least one of a silicon (Si) substrate, a glass substrate, a GaN substrate, a silica substrate, and a metal substrate including at least one of nickel (Ni), cobalt (Co), iron (Fe), platinum (Pt), palladium (Pd), gold (Au), aluminum (Al), chromium (Cr), copper (Cu), manganese (Mn), molybdenum (Mo), rhodium (Rh), iridium (Ir), tantalum (Ta), titanium (Ti), tungsten (W), uranium (U), vanadium (V), and zirconium (Zr).

10. The method of claim 1, wherein the depositing of the graphene sheet includes depositing the graphene sheet with an area of equal to or greater than about 1 cm².

11. The method of claim 1, wherein the depositing of the graphene sheet includes depositing the graphene sheet with less than or equal to 10 wrinkles per 1000 μ

m² of graphene.

12. The method of claim 1, wherein graphene sheet includes greater than or equal to 99% graphene per 1 mm² of the graphene sheet.

13. A graphene nano ribbon prepared according to the method of claim 1.

14. A transparent electrode comprising the graphene nano ribbon of claim 13.

15. An electronic device comprising the graphene nano ribbon of claim 13.

16. A method of preparing a graphene nano ribbon, the method comprising:

plasma treating a graphene sheet including at least one graphene layer to form a graphene pattern.

17. The method of claim 16, further comprising:

forming a carbon mask on the graphene sheet.

18. The method of claim 17, further comprising:

thermally treating the graphene pattern and the carbon mask to remove the carbon mask and transform the graphene pattern into a plurality of carbon nano ribbons.

19. The method of claim 18, wherein the forming of the carbon mask includes irradiating a carbon layer with a laser without the presence of a photoresist, and

the carbon layer includes amorphous carbon.

20. The method of claim 18, wherein the forming of the carbon mask includes depositing the carbon layer using chemical vapor deposition (CVD).