MEMS Gyroscope for Detecting Rotational Motions about an X-, Y-, and/or Z-Axis

• US 20110303007A1
• Filed: 02/11/2010
• Published: 12/15/2011
• Est. Priority Date: 02/27/2009
• Status: Active Grant

• Current Assignee: Hanking Electronics Hongkong Company Limited
• Original Assignee: Sensordynamics AG
• Inventors: Rocchi, Alessandro
• Granted Patent: US 8,789,416 B2
• Time in Patent Office: Days
• US Class Current: 73/504.09
• CPC Class Codes: G01C 19/5712 the devices involving a micromechanical structure
• CPC Class Codes: G01C 19/574 the devices having two sensing masses in anti-phase motion

Abstract

The invention relates to a MEMS gyroscope for detecting rotational motions about an x-, y-, and/or z-axis, in particular a 3-D sensor, containing a substrate, several, at least two, preferably four, drive masses (2) that are movable radially with respect to a center and drive elements (7) for the oscillating vibration of the drive masses (2) in order to generate Coriolis forces on the drive masses (2) in the event of rotation of the substrate about the x-, y-, and/or z-axis. The oscillating drive masses (2) are connected to at least one further non-oscillating sensor mass (3) that however can be rotated about the x-, y-, and/or z-axis together with the oscillating drive masses (2) on the substrate. Sensor elements (9, 10) are used to detect deflections of the sensor mass (3) and/or drive masses (2) in relation to the substrate due to the generated Coriolis forces. At least two, preferably four anchors (5) are used to rotatably fasten the sensor mass (3) to the substrate by means of springs (4).

Claims

1. MEMS gyroscope for detecting rotary movements about an x, y and/or z axis, particularly as a three-dimensional sensor,

with a substrate,

with multiple, at least two, preferably four driving masses (2) movable radially relative to a central point,

with drive elements (7) for the oscillating vibration of the driving masses (2) in order to generate Coriolis forces on the driving masses (2) in the event of rotation of the substrate about the x, y and/or z axis and

wherein the oscillating driving masses (2) are connected to at least one additional sensor mass (3), which is non-oscillating but which can be rotated on the substrate about the x, y and/or z axis together with the oscillating driving masses (2) and

with sensor elements (9, 10), in order to detect displacements of the sensor mass (3) and/or the driving masses (2) in relation to the substrate as a result of the generated Coriolis forces, and

with at least two, preferably four anchoring devices (5) for the rotary attachment of the sensor mass (3) to the substrate by means of springs (4).

2-15. -15. (canceled)