DEVICE FOR TREATING DISC-LIKE ARTICLES

• US 20110304107A1
• Filed: 08/25/2011
• Published: 12/15/2011
• Est. Priority Date: 03/31/2009
• Status: Active Grant

• Current Assignee: Lam Research AG (Lam Research Corporation)
• Original Assignee: Lam Research AG (Lam Research Corporation)
• Inventors: OBWEGER, Rainer, WIRNSBERGER, Thomas, KUMNIG, Franz
• Granted Patent: US 8,833,380 B2
• Time in Patent Office: Days
• US Class Current: 279/60
• CPC Class Codes: H01L 21/68707 the wafers being placed on a robot blade, or gripped by a gripper for conveyance
• CPC Class Codes: H01L 21/68728 characterised by a plurality of separate clamping members, e.g. clamping fingers
• CPC Class Codes: Y10T 279/17615 Obliquely guided reciprocating jaws

Abstract

A device for treating a disc-like article with a fluid, includes elements for dispensing a fluid onto the article and a chuck for holding and rotating the article around an axis perpendicular thereto. The chuck includes a base body, a drive ring, and gripping members for contacting the article at its edge. The gripping members are eccentrically movable with respect to the center of the article. The eccentric movement of the gripping members is driven by a drive ring rotatably mounted to the base body, so that the drive ring is rotatable against the base body around the axis. The relative rotational movement of the drive ring against the base body is carried out by either holding the base body and rotating the drive ring or by holding the drive ring and rotating the base body, whereby the to-be-held-part (drive ring or base body) is held without touching the respective to-be-held-part by magnetic force.

Claims

1. A device for treating a disc-like article with a fluid, the device comprising at least one dispenser for dispensing a fluid onto a disc-like article and a chuck for holding and rotating a disc-like article about an axis A perpendicular to the disc-like article, the chuck comprising a base body and gripping members for contacting the disc-like article at its edge, wherein the gripping members are radially movable with respect to the axis A, and wherein the gripping members extend downwardly from an obliquely-inclined radially-inwardly facing annular surface of the base body.

2. The device according to claim 1, wherein the obliquely-inclined radially-inwardly facing annular surface of the base body surrounds the gripping members and overhangs a disc-like article when held by the gripping members.

3. The device according to claim 1, wherein the radial movement of the gripping members is driven by a drive ring, wherein the drive ring is rotatably mounted to the base body, so that the drive ring is rotatable against the base body around the axis A and thereby driving the gripping members, wherein the relative rotational movement of the drive ring against the base body is carried out by either holding the base body and rotating the drive ring or by holding the drive ring and rotating the base body, wherein the to-be-held-part (drive ring or base body) is held without touching the respective to-be-held-part by magnetic force.

4. The device according to claim 3, wherein the to-be-rotated part (base body or driving ring respectively) is rotated by magnetic force without touching the respective to be rotated part.

5. The device according to claim 3, wherein the base body is formed as a hollow ring with an annular chamber and where the drive ring is accommodated within the annular chamber.

6. The device according to claim 1, wherein the chuck is freely levitated by a magnetic bearing.

7. The device according to claim 1, wherein the chuck is levitated and rotated by an active magnetic bearing or a bearing supported by high temperature superconducting magnets.

8. The device according to claim 3, wherein the drive ring is a gear ring and the gripping members are cams each eccentrically mounted to a respective smaller gear that is in meshing engagement with the gear ring.

9. The device according to claim 3, wherein the drive ring is held in standby position by an elastic member, whereby the gripping members are urged into closed position.

10. The device according to claim 1, wherein the device further comprises a wall surrounding the chuck and during treating the disc-like article the chuck is freely levitated within the wall.

11. The device according to claim 10, wherein the wall surrounding the chuck is part of a closed chamber.

12. The device according to claim 1, wherein plural dispensers are provided for unobstructed dispensing of fluids onto both sides of the disc-like article.