SEMICONDUCTOR DEVICE
First Claim
1. A semiconductor device comprising:
- a gate electrode layer;
an oxide semiconductor layer;
a source electrode layer and a drain electrode layer which are electrically connected to the oxide semiconductor layer; and
a gate insulating layer formed between the gate electrode layer and the oxide semiconductor layer,wherein a hydrogen concentration in the gate insulating layer is less than 6×
1020 atoms/cm3 and a fluorine concentration in the gate insulating layer is greater than or equal to 1×
1020 atoms/cm3.
1 Assignment
0 Petitions
Accused Products
Abstract
An object is to provide a semiconductor device having good electrical characteristics. A gate insulating layer having a hydrogen concentration less than 6×1020 atoms/cm3 and a fluorine concentration greater than or equal to 1×1020 atoms/cm3 is used as a gate insulating layer in contact with an oxide semiconductor layer forming a channel region, so that the amount of hydrogen released from the gate insulating layer can be reduced and diffusion of hydrogen into the oxide semiconductor layer can be prevented. Further, hydrogen present in the oxide semiconductor layer can be eliminated with the use of fluorine; thus, the hydrogen content in the oxide semiconductor layer can be reduced. Consequently, the semiconductor device having good electrical characteristics can be provided.
-
Citations
13 Claims
-
1. A semiconductor device comprising:
-
a gate electrode layer; an oxide semiconductor layer; a source electrode layer and a drain electrode layer which are electrically connected to the oxide semiconductor layer; and a gate insulating layer formed between the gate electrode layer and the oxide semiconductor layer, wherein a hydrogen concentration in the gate insulating layer is less than 6×
1020 atoms/cm3 and a fluorine concentration in the gate insulating layer is greater than or equal to 1×
1020 atoms/cm3. - View Dependent Claims (2, 3, 4)
-
-
5. A semiconductor device comprising:
-
a gate electrode layer; an oxide semiconductor layer; a source electrode layer and a drain electrode layer which are electrically connected to the oxide semiconductor layer; a gate insulating layer formed between the gate electrode layer and the oxide semiconductor layer; and an insulating layer overlapping the gate insulating layer, the insulating layer being in contact with the oxide semiconductor layer, wherein a hydrogen concentration in the gate insulating layer is less than 6×
1020 atoms/cm3 and a fluorine concentration in the gate insulating layer is greater than or equal to 1×
1020 atoms/cm3, andwherein a hydrogen concentration in the insulating layer is less than 6×
1020 atoms/cm3 and a fluorine concentration in the insulating layer is greater than or equal to 1×
1020 atoms/cm3. - View Dependent Claims (6, 7, 8)
-
-
9. A semiconductor device comprising:
-
a gate electrode layer; an oxide semiconductor layer; a source electrode layer and a drain electrode layer which are electrically connected to the oxide semiconductor layer; a first gate insulating layer formed covering the gate electrode layer; and a second gate insulating layer covering the first gate insulating layer and being in contact with the oxide semiconductor layer, wherein a hydrogen concentration in the second gate insulating layer is less than 6×
1020 atoms/cm3 and a fluorine concentration in the second gate insulating layer is greater than or equal to 1×
1020 atoms/cm3. - View Dependent Claims (10, 11, 12, 13)
-
Specification