SEMICONDUCTOR CHIP WITH FINE PITCH LEADS FOR NORMAL TESTING OF SAME
First Claim
1. A semiconductor chip comprising:
- a semiconductor substrate having a top surface and a bottom surface;
a circuit layer formed over the top surface of the semiconductor substrate and having bonding pads;
through electrodes formed to pass from a bottom surface to the top surface of the semiconductor substrate, and comprising through parts connected with the bonding pads and projecting parts formed on the bottom surface of the semiconductor substrate; and
test pad parts disposed on the bottom surface of the semiconductor substrate and connected with the through electrodes.
1 Assignment
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Accused Products
Abstract
A semiconductor chip includes a semiconductor substrate having a top surface and a bottom surface. A circuit layer having bonding pads may be formed over the top surface of the semiconductor substrate. Through electrodes may be formed to pass from a bottom surface to a top surface of the semiconductor substrate, and the through electrodes may comprise through parts connected with the bonding pads and projecting parts formed over the bottom surface of the semiconductor substrate and electrically connected with the through parts. Test pad parts may be disposed over the bottom surface of the semiconductor substrate and is connected with the through electrodes to test normal operation of the circuit layer and electrical connections of the through electrodes and the circuit layer.
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Citations
20 Claims
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1. A semiconductor chip comprising:
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a semiconductor substrate having a top surface and a bottom surface; a circuit layer formed over the top surface of the semiconductor substrate and having bonding pads; through electrodes formed to pass from a bottom surface to the top surface of the semiconductor substrate, and comprising through parts connected with the bonding pads and projecting parts formed on the bottom surface of the semiconductor substrate; and test pad parts disposed on the bottom surface of the semiconductor substrate and connected with the through electrodes. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14, 15, 16, 17, 18, 19, 20)
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Specification