ANTENNA, SEMICONDUCTOR DEVICE, AND METHOD OF MANUFACTURING ANTENNA
First Claim
1. An antenna comprising:
- an antenna coil provided over a first region of a base; and
a capacitor including a second region of the base as a dielectric body, a first electrode and a second electrode, the first electrode provided over a first side of the second region of the base, and the second electrode provided over a second side of the second region of the base,wherein the second region of the base is thinner than the first region of the base.
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Accused Products
Abstract
In an antenna and a semiconductor device including the antenna, an object is to reduce the distance between electrodes of a capacitor as much as possible, reduce the area of the electrode of the capacitor as much as possible, and prevent the suppression of response sensitivity and a response range of the semiconductor device. The present invention relates to an antenna including an antenna coil provided over a first region of a base and a capacitor which uses a second region of the base as a dielectric body and which has electrodes provided for opposite planes of the second region of the base, wherein the second region of the base is thinner than the first region of the base, and also relates to a semiconductor device including the antenna.
13 Citations
14 Claims
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1. An antenna comprising:
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an antenna coil provided over a first region of a base; and a capacitor including a second region of the base as a dielectric body, a first electrode and a second electrode, the first electrode provided over a first side of the second region of the base, and the second electrode provided over a second side of the second region of the base, wherein the second region of the base is thinner than the first region of the base. - View Dependent Claims (2)
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3. A semiconductor device comprising:
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a first antenna coil provided over a first region of a base; a capacitor including a second region of the base as a dielectric body, a first electrode and a second electrode, the first electrode provided over a first side of the second region of the base, and the second electrode provided over a second side of the second region of the base; and a chip including a semiconductor integrated circuit and a second antenna coil, wherein the second region of the base is thinner than the first region of the base. - View Dependent Claims (4)
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5. A method of manufacturing an antenna including an antenna coil and a capacitor, comprising the steps of:
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rotating a roller having a projection portion while pressing the roller onto a base with a first thickness; providing the base with a dielectric body of the capacitor by pressing the projection portion onto a first plane of the base, the dielectric body having a second thickness smaller than the first thickness; forming an opening in the base; forming a first conductive material over a first plane of a region with the second thickness, inside the opening, and over the first plane of the base; forming a second conductive material over the first plane of the base and a second plane thereof on an opposite side; and heating the first conductive material and the second conductive material so as to form the antenna coil and an electrode of the capacitor. - View Dependent Claims (6, 7, 8, 9)
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10. A method of manufacturing an antenna including an antenna coil and a capacitor, comprising the steps of:
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irradiating a first plane of a base having a first thickness by a laser beam to provide a dielectric body of the capacitor having a second thickness smaller than the first thickness; forming an opening in the base; forming a first conductive material over the first plane of a region with the second thickness, inside the opening, and over the first plane of the base; forming a second conductive material over the first plane of the base and a second plane thereof on an opposite side of the base; and heating the first conductive material and the second conductive material so as to form the antenna coil and an electrode of the capacitor. - View Dependent Claims (11, 12, 13, 14)
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Specification