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BIAXIAL SCANNING MIRROR FOR IMAGE FORMING APPARATUS

  • US 20110310452A1
  • Filed: 06/17/2010
  • Published: 12/22/2011
  • Est. Priority Date: 06/17/2010
  • Status: Active Grant
First Claim
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1. A biaxial scanning mirror for an image forming apparatus, comprising:

  • a first wafer, comprising;

    a mirror unit, rotating with respect to a first axis, for reflecting light beams;

    a rectangular rotating unit, formed around the mirror unit, for rotating the mirror unit around a second axis which is perpendicular to the first axis, wherein the rotating unit has two vertical sides perpendicular to the second axis and two parallel sides parallel to the second axis;

    a permanent magnet fixed at center of each of the two vertical sides; and

    a magnetically permeable layer formed below each of the two vertical sides of the rotating unit for extending magnetic field generated by the permanent magnet from the center of the rotating unit to both ends of the vertical sides;

    a second wafer having at least two cores, placed below both ends of the vertical sides of the rotating unit, each surrounded by a planar coil applied with an AC current for switching magnetic polarization of the cores such that the cores are attracted to or repelled from the rotating unit alternatively, thereby driving the rotating unit to rotate with respect to the second axis; and

    a spacer, formed between the second wafer and the first wafer, for separating the second wafer and the first wafer.

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