DATA COLLECTION SYSTEM FOR VACUUM PROCESSING APPARATUS
First Claim
Patent Images
1. A vacuum processing apparatus comprising:
- a transfer module that transfers an object to be processed;
a transfer module control device that acquires state data of the transfer module at first timing and transmits data including the state data;
a process module that is connected to the transfer module and performs processing on the object to be processed which is transferred from the transfer module;
a process module control device that acquires state data of the process module at second timing and transmits data including the state data; and
a data collection device that collects the state data of the transfer module and the process module,wherein at least one of the transfer module control device and the process module control device receives data including the state data from the other, and one of the transfer module and the process module updates, in response to timing of reception, its own state data with state data acquired by itself at that time and transmits a state data set including state data of the other to the data collection device.
1 Assignment
0 Petitions
Accused Products
Abstract
A control device of a transfer module and a process module in a vacuum processing apparatus collects state data from the modules. The control device has a state data set including data on the entire module, updates its own state data in the set of its own state data acquired at acquisition timing and transmits it to a data collection device at transmission timing. A plurality of control devices is connected in a loop or in a chain to the data collection device; a data transmission interval is shorter than a data collection interval, and entire transmission synchronization is set to be less than twice an interval of acquisition timing.
25 Citations
7 Claims
-
1. A vacuum processing apparatus comprising:
-
a transfer module that transfers an object to be processed; a transfer module control device that acquires state data of the transfer module at first timing and transmits data including the state data; a process module that is connected to the transfer module and performs processing on the object to be processed which is transferred from the transfer module; a process module control device that acquires state data of the process module at second timing and transmits data including the state data; and a data collection device that collects the state data of the transfer module and the process module, wherein at least one of the transfer module control device and the process module control device receives data including the state data from the other, and one of the transfer module and the process module updates, in response to timing of reception, its own state data with state data acquired by itself at that time and transmits a state data set including state data of the other to the data collection device. - View Dependent Claims (2, 3, 4, 5, 6)
-
-
7-11. -11. (canceled)
Specification
-
- Resources
Litigation Campaign Assessment
Thank you for your request. You will receive a custom alert email when the Litigation Campaign Assessment is available.
×
-
Current AssigneeCanon Anelva Corporation (Canon Inc.)
-
Original AssigneeCanon Anelva Corporation (Canon Inc.)
-
InventorsZhen, Yugui, Katsumata, Kiyohisa, Sumitani, Toshiaki, Azuma, Yoshinori
-
Granted Patent
-
Time in Patent OfficeDays
-
Field of Search
-
US Class Current700/213
-
CPC Class CodesG05B 19/41835 characterised by programme ...H01L 21/67276 Production flow monitoring,...H01L 21/67745 characterized by movements ...H01L 22/20 Sequence of activities cons...Y02P 90/02 Total factory control, e.g....
