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PLANAR CAVITY MEMS AND RELATED STRUCTURES, METHODS OF MANUFACTURE AND DESIGN STRUCTURES

  • US 20110314669A1
  • Filed: 12/20/2010
  • Published: 12/29/2011
  • Est. Priority Date: 06/25/2010
  • Status: Active Grant
First Claim
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1. A method of forming at least one Micro-Electro-Mechanical System (MEMS), comprising:

  • patterning a wiring layer to form at least one fixed plate;

    forming a sacrificial material on the wiring layer;

    forming an insulator layer of one or more films over the at least one fixed plate and exposed portions of an underlying substrate to prevent formation of a reaction product between the wiring layer and the sacrificial material;

    forming at least one MEMS beam that is movable over the at least one fixed plate; and

    venting or stripping of the sacrificial material to form at least a first cavity.

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