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Yaw rate sensor, sensor system, method for operating a yaw rate sensor and method for operating a sensor system

  • US 20110314912A1
  • Filed: 05/24/2011
  • Published: 12/29/2011
  • Est. Priority Date: 06/01/2010
  • Status: Active Grant
First Claim
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1. A yaw rate sensor, comprising:

  • a substrate;

    a drive unit;

    a seismic mass, which is movable relative to the substrate, the seismic mass being excitable to a working oscillation relative to the substrate by the drive unit, wherein a Coriolis deflection of the seismic mass perpendicular to the working oscillation is detectable; and

    an interrupt interface, wherein the drive unit is configured to reduce at least one of a frequency and an amplitude of the working oscillation if an interrupt signal is present at the interrupt interface.

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