Yaw rate sensor, sensor system, method for operating a yaw rate sensor and method for operating a sensor system
First Claim
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1. A yaw rate sensor, comprising:
- a substrate;
a drive unit;
a seismic mass, which is movable relative to the substrate, the seismic mass being excitable to a working oscillation relative to the substrate by the drive unit, wherein a Coriolis deflection of the seismic mass perpendicular to the working oscillation is detectable; and
an interrupt interface, wherein the drive unit is configured to reduce at least one of a frequency and an amplitude of the working oscillation if an interrupt signal is present at the interrupt interface.
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Abstract
A yaw rate sensor having a substrate and a seismic mass is described, in which the seismic mass is excitable to a working oscillation relative to the substrate via a drive unit, and a Coriolis deflection of the seismic mass is detectable relative to the substrate, in which the yaw rate sensor furthermore has an interrupt interface, the drive unit being configured to reduce a frequency and/or an amplitude of the working oscillation if an interrupt signal is present at the interrupt interface.
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Citations
12 Claims
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1. A yaw rate sensor, comprising:
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a substrate; a drive unit; a seismic mass, which is movable relative to the substrate, the seismic mass being excitable to a working oscillation relative to the substrate by the drive unit, wherein a Coriolis deflection of the seismic mass perpendicular to the working oscillation is detectable; and an interrupt interface, wherein the drive unit is configured to reduce at least one of a frequency and an amplitude of the working oscillation if an interrupt signal is present at the interrupt interface. - View Dependent Claims (2, 3, 11)
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4. A sensor system, comprising:
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a yaw rate sensor, including; a substrate, a drive unit, a seismic mass, which is movable relative to the substrate, the seismic mass being excitable to a working oscillation relative to the substrate by the drive unit, wherein a Coriolis deflection of the seismic mass perpendicular to the working oscillation is detectable, and an interrupt interface, wherein the drive unit is configured to reduce at least one of a frequency and an amplitude of the working oscillation if an interrupt signal is present at the interrupt interface; and a sensor; wherein the yaw rate sensor is coupled with the sensor via the interrupt interface, and wherein the sensor is configured to output the interrupt signal via the interrupt interface as a function of a sensor signal. - View Dependent Claims (5)
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6. A method for operating a yaw rate sensor, the method comprising:
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exciting a seismic mass to a working oscillation by a drive unit of the yaw rate sensor, the yaw rate sensor including; a substrate, the drive unit, the seismic mass, which is movable relative to the substrate, the seismic mass being excitable to the working oscillation relative to the substrate by the drive unit, wherein a Coriolis deflection of the seismic mass perpendicular to the working oscillation is detectable, and an interrupt interface, wherein the drive unit is configured to reduce at least one of a frequency and an amplitude of the working oscillation if an interrupt signal is present at the interrupt interface; detecting the Coriolis deflection of the seismic mass perpendicular to the working oscillation; and reducing at least one of a frequency and an amplitude of the working oscillation if an interrupt signal is detected at an interrupt interface of the yaw rate sensor. - View Dependent Claims (7, 8, 9, 12)
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10. A method for operating a sensor system, the method comprising:
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exciting a seismic mass to a working oscillation by a drive unit of the yaw rate sensor, the yaw rate sensor system including; a yaw rate sensor including; a substrate, the drive unit, the seismic mass, which is movable relative to the substrate, the seismic mass being excitable to the working oscillation relative to the substrate by the drive unit, wherein a Coriolis deflection of the seismic mass perpendicular to the working oscillation is detectable, and an interrupt interface, wherein the drive unit is configured to reduce at least one of a frequency and an amplitude of the working oscillation if an interrupt signal is present at the interrupt interface; and a sensor, wherein the yaw rate sensor is coupled with the sensor via the interrupt interface, and wherein the sensor is configured to output the interrupt signal via the interrupt interface as a function of a sensor signal; detecting the Coriolis deflection of the seismic mass perpendicular to the working oscillation; and reducing at least one of a frequency and an amplitude of the working oscillation if an interrupt signal is detected at an interrupt interface of the yaw rate sensor; wherein the interrupt signal is generated by the sensor, wherein the interrupt signal is generated as a function of a comparison between a sensor signal and a sensor threshold value, and wherein the interrupt signal is generated upon failure to reach a determined acceleration value.
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Specification