WIRELESS SELF-POWERED MONOLITHIC INTEGRATED CAPACITIVE SENSOR AND METHOD OF MANUFACTURE
First Claim
1. A wireless self-powered monolithic integrated capacitive sensor, comprising:
- a sensing capacitor that produces a first signal; and
a reference capacitor that produces a second signal;
wherein the wireless self-powered monolithic integrated capacitive sensor produces a sensing signal based on the difference between the first signal and the second signal.
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Accused Products
Abstract
Disclosed is a wireless self-powered monolithic integrated capacitive sensor, as well as methods of manufacturing same. A single monolithic chip may include various technologies, including RF MEMS, CMOS devices and related circuitry, and physical sensor MEMS. An example pressure sensor is disclosed, including a sensing capacitor and a reference capacitor that together allow the system to provide steady output in various environmental conditions. In one embodiment a pre-fabricated circuit wafer is fusion bonded to a pre-fabricated diaphragm wafer. Doped silicon may form the monolithic structure to provide the voltage necessary to run the system.
23 Citations
20 Claims
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1. A wireless self-powered monolithic integrated capacitive sensor, comprising:
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a sensing capacitor that produces a first signal; and a reference capacitor that produces a second signal; wherein the wireless self-powered monolithic integrated capacitive sensor produces a sensing signal based on the difference between the first signal and the second signal. - View Dependent Claims (2, 3, 4, 5, 6)
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7. A wireless self-powered monolithic integrated capacitive sensor, comprising:
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RF MEMS; a CMOS device; and physical sensor MEMS. - View Dependent Claims (8, 9, 10, 11, 12)
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13. A method of manufacturing a wireless self-powered monolithic integrated capacitive sensor, comprising the steps of:
fusion bonding a circuit silicon wafer to a diaphragm silicon wafer. - View Dependent Claims (14, 15, 16, 17, 18, 19, 20)
Specification