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MEMS STRUCTURE WITH A FLEXIBLE MEMBRANE AND IMPROVED ELECTRIC ACTUATION MEANS

  • US 20110315529A1
  • Filed: 03/18/2010
  • Published: 12/29/2011
  • Est. Priority Date: 03/20/2009
  • Status: Active Grant
First Claim
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1. A MEMS structure comprising a flexible membrane, which has a main longitudinal axis defining a longitudinal direction, at least one pillar under the flexible membrane, electric lowering actuation means that are adapted to bend down the flexible membrane into a down forced state, electric raising actuation means that are adapted to bend up the flexible membrane into an up forced state, and wherein the electric lowering actuation means or the electric raising actuation means comprise an actuation area, that extends under a part of the membrane and that is adapted to exert pulling forces on the membrane simultaneously on both sides of the said at least one pillar in the longitudinal direction.

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