Electron Microscope Device
First Claim
1. An electron microscope device, comprising a scanning electron microscope and an optical microscope, wherein said scanning electron microscope has scanning means for scanning an electron beam and an electron detector for detecting electron issued from a specimen scanned over by the electron beam, and said scanning electron microscope acquires a scanning electron image based on a detection result from said electron detector, and said optical microscope has a light emitting source for illuminating an illumination light, and said optical microscope illuminates said illumination light to said specimen, and acquires an optical image by receiving a reflection light from said specimen,and wherein said electron detector has a fluorescent substance layer for electron-light conversion, a wavelength filter for restricting so that all or almost all of wavelength ranges of the fluorescent light from said fluorescent substance layer passes through, and a wavelength detecting element for receiving said fluorescent light passing through said wavelength filter and performing optical-electric conversion, wherein the light amount of said illumination light in the wavelength range passing through said wavelength filter does not exceed a limit of deterioration of said scanning electron image.
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Accused Products
Abstract
The present invention provides an electron microscope device, comprising a scanning electron microscope 2 and an optical microscope 3, wherein the scanning electron microscope has scanning means 10 for scanning an electron beam and an electron detector 12 for detecting electron 11 issued from a specimen 8 scanned over by the electron beam, and the scanning electron microscope acquires a scanning electron image based on a detection result from the electron detector, the optical microscope has a light emitting source 13 for illuminating an illumination light, and the optical microscope illuminates the illumination light to the specimen, and acquires an optical image by receiving a reflection light from the specimen, and wherein the electron detector has a fluorescent substance layer for electron-light conversion, a wavelength filter for restricting so that all or almost all of wavelength ranges of the fluorescent light from the fluorescent substance layer passes through, and a wavelength detecting element for receiving the fluorescent light passing through the wavelength filter and performing optical-electric conversion, wherein the light amount of the illumination light in the wavelength range passing through the wavelength filter does not exceed a limit of deterioration of the scanning electron image.
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Citations
8 Claims
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1. An electron microscope device, comprising a scanning electron microscope and an optical microscope, wherein said scanning electron microscope has scanning means for scanning an electron beam and an electron detector for detecting electron issued from a specimen scanned over by the electron beam, and said scanning electron microscope acquires a scanning electron image based on a detection result from said electron detector, and said optical microscope has a light emitting source for illuminating an illumination light, and said optical microscope illuminates said illumination light to said specimen, and acquires an optical image by receiving a reflection light from said specimen,
and wherein said electron detector has a fluorescent substance layer for electron-light conversion, a wavelength filter for restricting so that all or almost all of wavelength ranges of the fluorescent light from said fluorescent substance layer passes through, and a wavelength detecting element for receiving said fluorescent light passing through said wavelength filter and performing optical-electric conversion, wherein the light amount of said illumination light in the wavelength range passing through said wavelength filter does not exceed a limit of deterioration of said scanning electron image.
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2. The electron microscope device according to claim wherein said light emitting source is an LED, and said LED has a light emission property that light intensity of spectrum included in transmission wavelength range of said wavelength filter is lower than light intensity of spectrum included in non-transmission wavelength range.
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7. The electron microscope device according to claim further comprising an interferometer for projecting an interference light to surface of said specimen and for detecting a position in height direction of said specimen by using reflection of said interference light from the surface of said specimen, wherein said interference light has a wavelength deviated from the transmission wavelength range of said wavelength filter.
Specification