TERAMOS-TERAHERTZ THERMAL SENSOR AND FOCAL PLANE ARRAY

• US 20110315880A1
• Filed: 12/22/2009
• Published: 12/29/2011
• Est. Priority Date: 12/31/2008
• Status: Active Grant

• Current Assignee: TECHNION RESEARCH AND DEVELOPMENT FOUNDATION, LTD.
• Original Assignee: TECHNION RESEARCH AND DEVELOPMENT FOUNDATION, LTD.
• Inventors: Nemirovsky, Yael
• Granted Patent: US 8,759,776 B2
• Time in Patent Office: Days
• US Class Current: 250/340
• CPC Class Codes: G01J 1/4228 arrangements with two or more detectors, e.g. for sensitivity compensation
• CPC Class Codes: G01J 5/024 Special manufacturing steps or sacrificial layers or layer structures
• CPC Class Codes: G01J 5/20 using resistors, thermistors or semiconductors sensitive to radiation, e.g. photoconductive devices

Abstract

A TeraMOS sensor based on a CMOS-SOI-MEMS transistor, thermally isolated by the MEMS post-processing, designed specifically for the detection of THz radiation which may be directly integrated with the CMOS-SOI readout circuitry, in order to achieve a breakthrough in performance and cost. The TeraMOS sensor provides a low-cost, high performance THz passive or active imaging system (roughly in the range of 0.5-1.5 THz) by combining several leading technologies: Complementary Metal Oxide Semiconductor (CMOS)-Silicon on Insulator (SOI), Micro Electro Mechanical Systems (MEMS) and photonics. An array of TeraMOS sensors, integrated with readout circuitry and driving and supporting circuitry provides a monolithic focal plane array or imager. This imager is designed in a commercial CMOS-SOI Fab and the MEMS micromachining is provided as post-processing step in order to reduce cost. Thus the CMOS transistors and technology provide the sensors as well as the signal processing and additional readout circuitry both in the pixels as well as around the sensor array.

Claims

1. A device comprising:

a single crystal silicon-on-insulator (SOI) bulk layer;

the device is characterized by comprising;

at least one thermally isolated Metal Oxide Semiconductor transistor (TeraMOS transistor) with temperature dependent electrical parameters;

an absorption structure for the absorption of terahertz radiation;

electrical and thermal conductors independently connecting said at least one TeraMOS transistor to said single crystal SOI bulk layer; and

CMOS circuitry with readout circuits for sensor signal multiplexing, amplification and processing, wherein said absorption structure absorbs terahertz radiation and heats the at least one TeraMOS transistors transistor that transduces temperature changes into an electrical signal.

3. The device of claim 1, wherein the at least one TeraMOS transistor is designed to operate at sub-threshold region of operation.

4. The device of claim 1, wherein the at least one TeraMOS transistor is not limited to operate at sub-threshold region of operation.

5. The device of claim 1, wherein the at least one TeraMOS transistor operates at subthreshold and at an optimal operating point determined by its gate voltage, wherein the temperature sensitivity and the current responsivity are highest.

7. The device of claim 1, wherein said absorption structure comprises a perforated platform.

8. The device of claim 7, wherein said absorption structure comprises a coupled antenna.

9. The device of claim 7, wherein said perforated platform comprises an array of frames and inner holes.

10. The device of claim 7, wherein said CMOS circuitry with readout circuits is integrated with an array of TeraMOS transistors, thereby forming a monolithic focal plane array (FPA) comprising a 2-D array of pixels for THz imaging systems.

11. The device of claim 1, comprising a plurality of tiles, each tile comprises one or more TeraMOS transistors and is arranged to operate as an individual sensor, wherein the CMOS circuitry is arranged to add readings of multiple tiles to provide a pixel.

12. The device of claim 9, wherein a number of tiles that form a pixel is based on a wavelength of a terahertz radiation to be sensed by the pixel.

13. The device of claim 9, wherein a number of tiles per pixel is a linear function of a wavelength of terahertz radiation to be sensed.

15. The device of claim 1, wherein said thermally isolated TeraMOS transistor and the surrounding medium is evacuated to reduce air conductance.

16. The device of claim 1, packaged inside a dewar and cooled to cryogenic temperatures by a closed cycle cooler.

17. The device of claim 16, wherein said cooling is in the range of 77°

K using closed cycle Stirling coolers.

18. The device of claim 16, wherein said packaging provides vacuum encapsulation as well as cooled operation at cryogenic temperatures.

19. The device of claim 7, wherein the perforated platform is connected to the SOI bulk layer by said holding arm, and wherein the at least one TeraMOS transistor is located on said perforated platform and said TeraMOS transistor dimensions are smaller than said perforated platform.

21. The device of claim 1, comprising a thin metallization layer located on a buried oxide layer, for impedance matching, wherein the at least one TeraMOS transistor element faces down towards a backside reflecting conducting wafer.

22. The device of claim 7, wherein the at least one TeraMOS transistor and the perforated platform are decoupled.

23. The device of claim 1, wherein several TeraMOS transistors are coupled to each other to provide a single sensing element;

wherein several gates of several TeraMOS transistors are coupled to each other.

24. The device of claim 1, comprising a focal plane array that operates in a range of 0.5-1.5 THz.

25. The device of claim 1, comprising a focal plane array that is not limited to the range of 0.5-1.5 THz.

26. The device of claim 7 wherein the perforated platform forms a quarter-wavelength absorber with a separate backside reflecting conducting wafer.

34. The device according to claim 7, comprising multiple tiles, each tile comprises at least one TeraMOS transistor, wherein a number of tiles that form a pixel is based on a wavelength of a terahertz radiation to be sensed by the pixel.

2. (canceled)

14. The device of claim 2, wherein said interconnects of said at least one TeraMOS transistor are reduced to two by a diode-like design, wherein said drain and gate terminals are connected and said bulk and source terminals are connected, thereby improving the thermal isolation.

6. (canceled)

20. The device of claim 73, wherein said perforated platform is thinner than the at least one TeraMOS transistor cross-section, such that said perforated platform contributes lower thermal mass.

27. A method for producing a device, the method comprising:

providing a single crystal silicon-on-insulator (SOI) bulk layer;

providing at least one thermally isolated Metal Oxide Semiconductor (TeraMOS) transistors with temperature dependent electrical parameters;

providing electrical and thermal conductors independently connecting the at least one TeraMOS transistors to said single crystal SOI bulk layer;

providing an absorption structure for the absorption of terahertz radiation; and

providing CMOS circuitry with readout circuits for sensor signal multiplexing, amplification and processing, wherein the absorption structure is arranged to absorb terahertz radiation and to heat the at least one TeraMOS transistor that is arranged to transduce temperature changes into an electrical signal.

28. The method of claim 27, wherein comprising providing a plurality of metallization layers;

said metallization layers comprise built-in front side etching masks comprising a first metal for said holding arm and a second metal for said TeraMOS transistor in order to provide alignment accuracy and resolution during the CMOS process and significantly reduce the fabrication cost; and

removing the built-in front side etching masks.

29. The method of claim 28, wherein said built-in masks further comprise a third metal aluminum mask.

30. The method of claim 27, comprising:

applying a CMOS-SOI process;

applying a deep Reactive Ion Etch (DRIE) anisotropic bulk micromachining on the SOI bulk layer; and

applying a Reactive Ion Etching (RIE) from a front side of the device to release the at least one TeraMOS transistor and a holding arm of the device from an inter-level dielectric layer encompassing the at least one TeraMOS transistor and the holding arm.

31. The method of claim 30, further comprising evaporating a thin metallic layer on the SOI bulk layer.

32. The method of claim 27, comprising providing the at least one TeraMOS transistor using Deep Reactive Ion Etch (DRIE) micromachining backside etching and either DRIE or Reactive Ion Etch (RIE) micromachining front side etching.

33. A method for sensing terahertz radiation, the method comprises:

providing a device that comprises a single crystal silicon-on-insulator (SOI) bulk layer;

at least one thermally isolated Metal Oxide Semiconductor (TeraMOS) transistor with temperature dependent electrical parameters;

electrical and thermal conductors independently connecting the at least one TeraMOS transistors to said single crystal SOI bulk layer;

an absorption structure for the absorption of terahertz radiation; and

providing CMOS circuitry with readout circuits for sensor signal multiplexing, amplification and processing, wherein the absorption structure is arranged to absorb terahertz radiation and to heat the at least one TeraMOS transistor that is arranged to transduce temperature changes into an electrical signal;

absorbing the terahertz radiation and heating the at least one TeraMOS transistor in response to the absorbing of the terahertz radiation, by the absorption structure; and

transducing, by the at least one TeraMOS transistor, temperature changes resulting from the heating of the at least one TeraHertz transistor into an electrical signal.