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METHOD FOR FORMING TANTALUM NITRIDE FILM AND FILM-FORMING APPARATUS FOR FORMING THE SAME

  • US 20110318505A1
  • Filed: 12/07/2009
  • Published: 12/29/2011
  • Est. Priority Date: 12/09/2008
  • Status: Abandoned Application
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1-10. -10. (canceled)

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