MICROELECTROMECHANICAL THREE-AXIS CAPACITIVE ACCELEROMETER
First Claim
1. A micromechanical structure for a MEMS three-axis capacitive accelerometer, comprising:
- a substrate;
a single inertial mass which has a main extension in a plane and is arranged suspended above said substrate;
coupling elastic elements;
anchorages;
anchorage elastic elements;
a frame element, elastically coupled to said inertial mass by the coupling elastic elements, and coupled to the anchorages, fixed with respect to said substrate, by the anchorage elastic elements;
wherein said coupling elastic elements and said anchorage elastic elements are configured so as to enable a first inertial movement of said inertial mass in response to a first external acceleration in a first direction lying in said plane, and to enable a second inertial movement of said inertial mass in response to a second external acceleration in a second direction transverse to said plane.
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Accused Products
Abstract
A micromechanical structure for a MEMS three-axis capacitive accelerometer is provided with: a substrate; a single inertial mass having a main extension in a plane and arranged suspended above the substrate; and a frame element, elastically coupled to the inertial mass by coupling elastic elements and to anchorages, which are fixed with respect to the substrate by anchorage elastic elements. The coupling elastic elements and the anchorage elastic elements are configured so as to enable a first inertial movement of the inertial mass in response to a first external acceleration acting in a direction lying in the plane and also a second inertial movement of the inertial mass in response to a second external acceleration acting in a direction transverse to the plane.
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Citations
21 Claims
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1. A micromechanical structure for a MEMS three-axis capacitive accelerometer, comprising:
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a substrate; a single inertial mass which has a main extension in a plane and is arranged suspended above said substrate; coupling elastic elements; anchorages; anchorage elastic elements; a frame element, elastically coupled to said inertial mass by the coupling elastic elements, and coupled to the anchorages, fixed with respect to said substrate, by the anchorage elastic elements; wherein said coupling elastic elements and said anchorage elastic elements are configured so as to enable a first inertial movement of said inertial mass in response to a first external acceleration in a first direction lying in said plane, and to enable a second inertial movement of said inertial mass in response to a second external acceleration in a second direction transverse to said plane. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13)
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14. A MEMS three-axis capacitive accelerometer, comprising:
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a micromechanical structure that includes; a substrate; a single inertial mass which has a main extension in a plane and is arranged suspended above said substrate; coupling elastic elements; anchorages; anchorage elastic elements; a frame element, elastically coupled to said inertial mass by the coupling elastic elements, and coupled to the anchorages, fixed with respect to said substrate, by the anchorage elastic elements; wherein said coupling elastic elements and said anchorage elastic elements are configured so as to enable a first inertial movement of said inertial mass in response to a first external acceleration in a first direction lying in said plane, and to enable a second inertial movement of said inertial mass in response to a second external acceleration in a second direction transverse to said plane; and an electronic reading circuit, electrically coupled to said micromechanical structure. - View Dependent Claims (15, 16, 17)
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18. An electronic device, comprising:
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a MEMS three-axis capacitive accelerometer that includes; a micromechanical structure that includes; a substrate; a single inertial mass which has a main extension in a plane and is arranged suspended above said substrate; coupling elastic elements; anchorages; anchorage elastic elements; a frame element, elastically coupled to said inertial mass by the coupling elastic elements, and coupled to the anchorages, fixed with respect to said substrate, by the anchorage elastic elements; wherein said coupling elastic elements and said anchorage elastic elements are configured so as to enable a first inertial movement of said inertial mass in response to a first external acceleration in a first direction lying in said plane, and to enable a second inertial movement of said inertial mass in response to a second external acceleration in a second direction transverse to said plane; an electronic reading circuit, electrically coupled to said micromechanical structure; and a digital processing unit coupled to said MEMS three-axis capacitive accelerometer. - View Dependent Claims (19, 20, 21)
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Specification