METHODS AND APPARATUS FOR TESTING ISFET ARRAYS

• US 20120001646A1
• Filed: 06/30/2011
• Published: 01/05/2012
• Est. Priority Date: 06/30/2010
• Status: Abandoned Application

• Current Assignee: Life Technologies Corporation (Thermo Fisher Scientific Incorporated)
• Original Assignee: Life Technologies Corporation (Thermo Fisher Scientific Incorporated)
• Inventors: FIFE, Keith, BOLANDER, Jarie, MILGREW, Mark
• Application Number:
  US13/173,621
• Publication Number:
  US 20120001646A1
• Time in Patent Office: Days
• US Class Current: 324/679
• CPC Class Codes: G01N 27/4145 specially adapted for biomolecules, e.g. gate electrode with immobilised receptors
• CPC Class Codes: G01N 27/4148 Integrated circuits therefor, e.g. fabricated by CMOS processing CMOS processing per se H01L21/82
• CPC Class Codes: G01R 31/2621 for testing field effect transistors, i.e. FET's
• CPC Class Codes: G01R 31/2829 Testing of circuits in sensor or actuator systems testing of apparatus for measuring electric or magnetic variables G01R35/00; testing of indicating or recording apparatus G01D; in airbag systems B60R21/0173; checking gas analysers G01N33/007; monitoring or fail-safe circuits for electromagnets H01F7/1844
• CPC Class Codes: H01L 2924/00 Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
• CPC Class Codes: H01L 2924/0002 Not covered by any one of groups H01L24/00, H01L24/00 and H01L2224/00

Abstract

The invention provides testing of a chemically-sensitive transistor device, such as an ISFET device, without exposing the device to liquids. In one embodiment, the invention performs a first test to calculate a resistance of the transistor. Based on the resistance, the invention performs a second test to transition the testing transistor among a plurality of modes. Based on corresponding measurements, a floating gate voltage is then calculated with little or no circuitry overhead. In another embodiment, the parasitic capacitance of at least either the source or drain is used to bias the floating gate of an ISFET. A driving voltage and biasing current are applied to exploit the parasitic capacitance to test the functionality of the transistor.

Claims

1. A method of testing a chemical detecting device comprised of an array of pixel elements, each pixel element including a chemically-sensitive transistor having a source terminal, a drain terminal, and a floating gate terminal, the method comprising:

connecting of a group of the chemically-sensitive transistors'"'"' source terminals in common;

applying first test voltages at the source terminals of the group;

measuring corresponding first currents at the drain terminals produced by the first test voltages;

calculating resistance values based on the first test voltages and currents;

applying second test voltages at the source terminals of the group to operate the group in a different operational mode, wherein the second test voltages are based at least partially on the resistance values;

measuring a corresponding second set of currents at the drain terminals produced by the second test voltages; and

based on the second test voltages and currents and operational properties of the chemically-sensitive transistors, calculating a floating gate voltage of each chemically-sensitive transistor in the group.

2. The method of claim 1, wherein each chemically-sensitive transistor is an Ion Sensitive Field Effect Transistor (ISFET).

3. The method of claim 1, wherein the group comprises all of the chemically-sensitive transistors in the array.

4. The method of claim 1, wherein the group comprises alternate rows of the array.

5. The method of claim 1, wherein the group comprises alternate columns of the array.

6. The method of claim 1, wherein the first test voltages are applied at different sides of the array sequentially.

7. The method of claim 1, further comprising applying test currents with the second test voltages.

8. The method of claim 1, wherein the second test voltages are applied at different sides of the array sequentially, and wherein the floating gate voltage is calculated in relation to each side of the array.

9. The method of claim 8, wherein the calculated floating gate voltages are averaged together for all sides.

10. The method of claim 2, wherein there is no fluid sample in contact with or adjacent to any floating gate terminal in the array.

11. The method of claim 1, wherein the different operational mode of the chemically sensitive transistors includes one of triode mode and saturation mode.

12. A method of dry testing an array of chemically-sensitive transistors having a source, a drain, and a floating gate, the method comprising:

applying first test voltages to a common source connected group of the chemically-sensitive transistors;

calculating a resistance based on the first test voltages and currents produced by the first set of test voltages;

applying second test voltages, wherein the second test voltages drive the chemically-sensitive transistors to transition among a plurality of operational modes and wherein the second test voltages are based partially on the calculated resistance;

calculating a floating gate voltage of each driven chemically-sensitive transistor; and

determining if each calculated floating gate voltage is within a predetermined threshold.

13. The method of claim 12, wherein the chemically-sensitive transistor is an ISFET.

14. The method of claim 12, wherein the common source connected group is the entire array.

15. The method of claim 12, wherein the common source connected group comprises alternate rows of the array.

16. The method of claim 12, wherein the common source connected group comprises alternate columns of the array.

17. The method of claim 12, wherein the plurality of operational modes include triode mode and saturation mode.

18. A device, comprising:

an array of chemical detection elements, each element including;

a chemically-sensitive field effect transistor having a semiconductor body terminal, a source terminal, a drain terminal, and a floating gate terminal; and

a testing circuit including;

a plurality of driving voltage terminals at each side of the array, the plurality of driving voltage terminals coupled to a plurality of source terminals and a plurality of body terminals;

a current source coupled to the drain terminal of at least one element in the array to measure a drain current by converting the drain current into corresponding voltage measurements.

19. The device of claim 18, wherein the chemically-sensitive transistor is an ISFET.

20. The device of claim 18, wherein the testing circuit is configured to drive the chemically-sensitive field effect transistors to operate in different modes.

21. The device of claim 20, wherein the different modes include triode mode and saturation mode.

22. A method of testing a transistor having a floating gate and an overlap capacitance between the floating gate and at least one of a first and a second terminal, the method comprising:

applying a test voltage to the first terminal of the transistor;

biasing a second terminal of the transistor;

measuring an output voltage at the second terminal; and

determining if the output voltage is within a predetermined range;

wherein the test voltage via the overlap capacitance places the transistor into an active mode.

23. The method of claim 22, wherein the transistor is an ISFET.

24. The method of claim 22, wherein the first terminal is a drain terminal and the second terminal is a source terminal.

25. The method of claim 22, further comprising:

adjusting the test voltage to another voltage value;

applying the adjusted test voltage to the first terminal;

measuring a second output voltage at the second terminal; and

determining a transistor property based on the output voltages.

26. The method of claim 25, wherein the transistor property is a transistor gain.

27. The method of claim 22, wherein the overlap capacitance is formed by a gate oxide layer material that partially overlaps a terminal implant of the transistor.

28. The method of claim 23, wherein there is no fluid sample in contact with or adjacent to the floating gate terminal.

29. A device, comprising:

an array of detection elements, each element including;

a field effect transistor having a floating gate, a first terminal, a second terminal, and an overlap capacitance between the floating gate and at least one of the first and second terminals; and

a testing circuit including;

a driving voltage terminal coupled to at least one first terminal,

a biasing current terminal coupled to at least one second terminal, and

an output voltage measurement terminal coupled to the at least one second terminal.

30. The device of claim 29, wherein each field effect transistor is an ISFET.

31. The device of claim 29, wherein the first terminal of each field effect transistor is a drain terminal and the second terminal of each field effect transistor is a source terminal.

32. The device of claim 29, wherein the overlap capacitance is formed by a gate oxide layer material that partially overlaps a terminal implant of the transistor.