NANO-STRUCTURED DIELECTRIC COMPOSITE
First Claim
1. A multilayer nanocomposite structure produced in a vacuum environment comprising:
- a void-free layer of discrete nanoparticles embedded in a radiation-cured dielectric polymer;
a layer of said polymer deposited over the layer of discrete nanoparticles in a thickness greater than an average diameter of the nanoparticles so as to provide a substantially level polymer spacer film above the layer of discrete nanoparticles, said layers of discrete nanoparticles and polymer constituting a dielectric structure;
wherein said dielectric structure is repeated to form a multilayer stack incorporating at least ten polymer layers per micron of thickness.
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Accused Products
Abstract
A multilayer dielectric structure is formed by vacuum depositing two-dimensional matrices of nanoparticles embedded in polymer dielectric layers that are thicker than the effective diameter of the nanoparticles, so as to produce a void-free, structured, three-dimensional lattice of nanoparticles in a polymeric dielectric material. As a result of the continuous, repeated, and controlled deposition process, each two-dimensional matrix of nanoparticles consists of a layer of uniformly distributed particles embedded in polymer and separated from adjacent matrix layers by continuous polymer dielectric layers, thus forming a precise three-dimensional nanoparticle matrix defined by the size and density of the nanoparticles in each matrix layer and by the thickness of the polymer layers between them. The resulting structured nanodielectric exhibits very high values of dielectric constant as well as high dielectric strength.
14 Citations
29 Claims
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1. A multilayer nanocomposite structure produced in a vacuum environment comprising:
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a void-free layer of discrete nanoparticles embedded in a radiation-cured dielectric polymer; a layer of said polymer deposited over the layer of discrete nanoparticles in a thickness greater than an average diameter of the nanoparticles so as to provide a substantially level polymer spacer film above the layer of discrete nanoparticles, said layers of discrete nanoparticles and polymer constituting a dielectric structure; wherein said dielectric structure is repeated to form a multilayer stack incorporating at least ten polymer layers per micron of thickness. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14, 15, 16)
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17. A process for manufacturing a nanocomposite dielectric medium in a multilayer structure comprising:
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(a) vacuum depositing a layer of nanoparticles; (b) flash evaporating and vacuum depositing a liquid monomer forming a layer that covers the nanoparticles so as to fill substantially all voids between the nanoparticles and to form a void-free, continuous spacer film overlaying the nanoparticles; (c) polymerizing the liquid monomer; and (d) repeating steps (a), (b) and (c) to deposit additional alternating layers of nanoparticles and polymer in a multilayer structure having at least ten nanoparticles layers for each micron of total thickness of the multilayer structure; - View Dependent Claims (19, 20, 21, 22, 23, 24, 25, 26, 27, 28, 29)
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18. The process of 17, wherein said polymer film has a thickness between 1 and 20 times an average diameter of the nanoparticles.
Specification