PROCESS FOR PRODUCING MULTILAYERED GAS-BARRIER FILM
First Claim
1. A method for producing a gas-barrier film, comprising:
- (1) forming an inorganic thin film by a vacuum deposition method on at least one surface of a base film;
(2) forming a second thin film by a plasma CVD method on the inorganic thin film formed in (1); and
(3) forming a third inorganic thin film by the vacuum deposition method on the second thin film formed in (2), wherein each of (1) and (3), and (2) are sequentially carried out at a pressure of 1×
10−
7 to 1 Pa, and at a pressure of 1×
10−
3 to 1×
102 Pa, respectively.
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Accused Products
Abstract
Provided are a method for producing a film, which is satisfactory in productivity, exhibits high gas-barrier property immediately after production, and has excellent adhesive strength between constituent layers while maintaining the excellent gas-barrier property, and a gas-barrier film, which is obtained by the method. The method for producing a gas-barrier film includes the steps of; (1) forming an inorganic thin film by a vacuum deposition method on at least one surface of a base film; (2) forming a thin film by a plasma CVD method on the inorganic thin film formed in the step (1); and (3) forming an inorganic thin film by the vacuum deposition method on the thin film formed in the step (2), in which each of the steps (1) and (3), and the step (2) are sequentially carried out at a pressure of 1×10−7 to 1 Pa, and at a pressure of 1×10−3 to 1×102 Pa, respectively.
394 Citations
15 Claims
-
1. A method for producing a gas-barrier film, comprising:
- (1) forming an inorganic thin film by a vacuum deposition method on at least one surface of a base film;
(2) forming a second thin film by a plasma CVD method on the inorganic thin film formed in (1); and
(3) forming a third inorganic thin film by the vacuum deposition method on the second thin film formed in (2), wherein each of (1) and (3), and (2) are sequentially carried out at a pressure of 1×
10−
7 to 1 Pa, and at a pressure of 1×
10−
3 to 1×
102 Pa, respectively. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 15)
- (1) forming an inorganic thin film by a vacuum deposition method on at least one surface of a base film;
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12. A gas-barrier film, comprising:
- a base film;
(A) an inorganic thin film formed by a vacuum deposition method on at least one surface of the base film; and
(B) at least one constituent unit layer including thin films formed successively by a plasma CVD method and the subsequent vacuum deposition method on the inorganic thin film (A), arranged in the stated order. - View Dependent Claims (13, 14)
- a base film;
Specification