MICROELECTROMECHANICAL GYROSCOPE WITH OPEN LOOP READING DEVICE AND CONTROL METHOD
First Claim
1. A circuit for use with a device having a first mass and a second mass coupled to the first mass to oscillate in response to the first mass and in response to movement of the device, the circuit comprising:
- a driving circuit coupled to the first mass to form a feedback control loop and to maintain the first mass in oscillation at a resonance frequency;
a reading device coupled to the second mass and structured to detect displacements of the second mass; and
a read signal generator structured to supply to the second mass at least one read signal having the form of a square-wave signal of amplitude that sinusoidally varies with the resonance frequency.
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Abstract
A microelectromechanical gyroscope that includes a first mass oscillatable according to a first axis; an inertial sensor, including a second mass, drawn along by the first mass and constrained so as to oscillate according to a second axis, in response to a rotation of the gyroscope; a driving device coupled to the first mass so as to form a feedback control loop and configured to maintain the first mass in oscillation at a resonance frequency; and an open-loop reading device coupled to the inertial sensor for detecting displacements of the second mass according to the second axis. The driving device includes a read signal generator for supplying to the inertial sensor at least one read signal having the form of a square-wave signal of amplitude that sinusoidally varies with the resonance frequency.
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Citations
19 Claims
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1. A circuit for use with a device having a first mass and a second mass coupled to the first mass to oscillate in response to the first mass and in response to movement of the device, the circuit comprising:
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a driving circuit coupled to the first mass to form a feedback control loop and to maintain the first mass in oscillation at a resonance frequency; a reading device coupled to the second mass and structured to detect displacements of the second mass; and a read signal generator structured to supply to the second mass at least one read signal having the form of a square-wave signal of amplitude that sinusoidally varies with the resonance frequency. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13)
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14. A system, comprising:
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a control unit; and a circuit for use with a device having a first mass and a second mass coupled to the first mass to oscillate in response to the first mass and in response to movement of the device, the circuit comprising; a driving circuit coupled to the first mass to form a feedback control loop and to maintain the first mass in oscillation at a resonance frequency; a reading device coupled to the second mass and adapted to detect displacements of the second mass; and a read signal generator adapted to supply to the second mass at least one read signal having the form of a square-wave signal of amplitude that sinusoidally varies with the resonance frequency. - View Dependent Claims (15, 16, 17, 18, 19)
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Specification