YAW RATE SENSOR
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Abstract
A yaw rate sensor includes a substrate having a substrate surface, a first movable element, which is disposed above the substrate surface and has a drive frame and a first detection mass, a first electrode, which is disposed at a distance underneath the first detection mass and connected to the substrate surface, and a second electrode which is disposed at a distance above the first detection mass and connected to the substrate surface. The drive frame is connected to the substrate via at least one drive spring, the detection mass is connected to the drive frame via at least one detection spring, and the first movable element is excitable to a drive oscillation parallel to the substrate surface, and the first detection mass is deflectable perpendicular to the substrate surface.
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Citations
28 Claims
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1-13. -13. (canceled)
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14. A yaw rate sensor comprising:
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a substrate having a substrate surface, a first movable element, which is disposed above the substrate surface and includes a drive frame and a first detection mass, a first electrode, which is disposed at a distance underneath the first detection mass and connected to the substrate surface, and a second electrode, which is disposed at a distance above the first detection mass and connected to the substrate surface, the drive frame being connected to the substrate via at least one drive spring, the detection mass being connected to the drive frame via at least one detection spring, the first movable element being excitable to a drive oscillation parallel to the substrate surface, and the first detection mass being deflectable perpendicular to the substrate surface. - View Dependent Claims (15, 16, 17, 18, 19, 20, 21, 22, 23, 24, 25, 26, 27, 28)
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Specification