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Charged Particle Beam Processing System with Visual and Infrared Imaging

  • US 20120006987A1
  • Filed: 07/08/2011
  • Published: 01/12/2012
  • Est. Priority Date: 07/08/2010
  • Status: Active Grant
First Claim
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1. A charged particle beam system for processing a substrate, comprising:

  • a charged particle column, configured to produce a beam of charged particles which can be focused on the surface of the substrate;

    an in-vacuum optical subsystem, configured to collect scattered infrared radiation and visible light from the surface and regions near the surface of the substrate;

    a precision stage, configured to transport the substrate alternately between a location under the in-vacuum optical subsystem and a location under the charged particle column;

    an illumination subsystem, configured to provide infrared radiation and visible light to the surface of the substrate; and

    an imaging subsystem, configured to focus the scattered infrared radiation and visible light collected by the in-vacuum optical subsystem onto one or more detectors.

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