METHOD FOR MANUFACTURING DISPLAY DEVICE

• US 20120007087A1
• Filed: 09/21/2011
• Published: 01/12/2012
• Est. Priority Date: 02/26/2008
• Status: Active Grant

• Current Assignee: Semiconductor Energy Laboratory Co., Ltd.
• Original Assignee: Semiconductor Energy Laboratory Co., Ltd.
• Inventors: MIZOGUCHI, Takafumi, MIKAMI, Mayumi, SAITO, Yumiko
• Granted Patent: US 8,901,561 B2
• Time in Patent Office: Days
• US Class Current: 257/59
• CPC Class Codes: H01L 21/764 Air gaps H01L21/76264 takes precedence
• CPC Class Codes: H01L 27/1288 employing particular masking sequences or specially adapted masks, e.g. half-tone mask

Abstract

A first conductive film, a first insulating film, a semiconductor film, an impurity semiconductor film, a second conductive film, and a first resist mask are formed; first etching is performed to expose at least a surface of the first conductive film; second etching accompanied by side etching is performed on part of the first conductive film to form a gate electrode layer; a second resist mask is formed; third etching is performed to form a source and drain electrode layers, a source and drain regions, and a semiconductor layer; a second insulating film is formed; an opening portion is formed in the second insulating film to partially expose the source or drain electrode layer; a pixel electrode is selectively formed in the opening portion and over the second insulating film; and a supporting portion formed using the gate electrode layer is formed in a region overlapping with the opening portion.

Claims

1. A semiconductor device comprising:

a gate electrode and a first electrode on an insulating surface;

a first insulating film over the gate electrode and the first electrode;

a semiconductor layer over the first insulating film;

a source region and a drain region over the semiconductor layer;

a source electrode and a drain electrode over the source region or the drain region;

a second insulating film over the source electrode and the drain electrode;

an opening portion in the second insulating film; and

a pixel electrode over the second insulating film,

wherein the pixel electrode is connected to the drain electrode via the opening portion; and

wherein the first electrode, the semiconductor layer and the drain region overlap with the opening portion of the second insulating film.

2. The semiconductor device according to claim 1,

wherein the gate electrode and the first electrode are electrically isolated.

3. The semiconductor device according to claim 1,

wherein the semiconductor layer overlaps with the gate electrode and the first electrode.

4. The semiconductor device according to claim 1,

wherein the drain electrode overlaps with the first electrode to form a capacitor.

5. The semiconductor device according to claim 1,

wherein the gate electrode and the first electrode contain a same material.

6. The semiconductor device according to claim 1,

wherein the gate electrode and the first electrode include a material selected from the group consisting of titanium, molybdenum, chromium, tantalum, tungsten, aluminum, copper, neodymium, niobium, and scandium, or an alloy material containing any of the materials.

7. The semiconductor device according to claim 1, wherein the first insulating film is isolated from the insulating surface between the gate electrode and the first electrode.

8. The semiconductor device according to claim 1, wherein the first insulating film does not cover a side portion of the gate electrode and a side portion of the first electrode.

9. The semiconductor device according to claim 1,

wherein a cavity is formed between the gate electrode and the first electrode, and between the insulating surface and the first insulating film.

10. The semiconductor device according to claim 1,

wherein a side portion of the gate electrode is located behind a side portion of the first insulating film.