MICROMACHINED OFFSET REDUCTION STRUCTURES FOR MAGNETIC FIELD SENSING
First Claim
1. A micromachining magnetic sensing device comprises:
- a magnetic sensor, anda stress isolation structure comprising separations between the magnetic sensor and a bulk layer.
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Abstract
A micromachined magnetic field sensor integrated with electronics is disclosed. The magnetic field sensors utilize Hall-effect sensing mechanisms to achieve 3-axis sensing. A Z axis sensor can be fabricated either on a device layer or on a conventional IC substrate with the design of conventional horizontal Hall plates. An X and Y axis sensor are constructed on the device layer. In some embodiments, a magnetic flux concentrator is applied to enhance the performance of the magnetic field sensor. In some embodiments, the magnetic field sensors are placed on slope sidewalls to achieve 3-axis magnetic sensing system. In some embodiments, a stress isolation structure is incorporated to lower the sensor offset. The conventional IC substrate and device layer are connected electrically to form a 3-axis magnetic sensing system. The magnetic field sensor can also be integrated with motion sensors that are constructed in the similar technology.
50 Citations
34 Claims
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1. A micromachining magnetic sensing device comprises:
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a magnetic sensor, and a stress isolation structure comprising separations between the magnetic sensor and a bulk layer. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14, 15, 16, 17)
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18. A method for providing magnetic field sensor comprises
providing a magnetic sensor, and providing a stress isolation structure comprising separations between the magnetic sensor and a bulk layer.
Specification