COUPLED ACOUSTIC DEVICES
First Claim
1. An acoustic device, comprising:
- a first coupled resonator filter (CRF) and a second CRF electrically coupled to one another,wherein each of the first CRF and the second CRF has an input port, an output port, a bottom film bulk acoustic resonator (FBAR), an acoustic decoupler formed on the bottom FBAR, and a top FBAR formed on the acoustic decoupler, wherein each of the bottom FBAR and the top FBAR has a bottom electrode, a piezoelectric layer formed on the bottom electrode, and a top electrode formed on the piezoelectric layer, and wherein the input and output ports of each CRF are electrically connected to first and second corresponding electrodes, respectively, such that the acoustic decoupler is located between the first and the second corresponding electrodes; and
wherein the output port of the first CRF is electrically connected to the input port of the second CRF.
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Abstract
In one aspect of the invention, an acoustic device has a first coupled resonator filter (CRF) and a second CRF electrically coupled to one another in series. Each CRF has an input port, an output port, a bottom film bulk acoustic resonator (FBAR), an acoustic decoupler formed on the bottom FBAR, and a top FBAR formed on the acoustic decoupler. Each FBAR has a bottom electrode, a piezoelectric layer formed on the bottom electrode, and a top electrode formed on the piezoelectric layer. The decoupling layer capacitance arising between the two electrodes enclosing the acoustic decoupler in a CRF is configured to achieve targeted filter response. A compensating capacitance is introduced to improve the amplitude and phase imbalance performance of an unbalanced to balanced CRF by eliminating the existence of asymmetric port-to-ground or feedback capacitance at the balanced output port produced by the decoupling layer capacitance.
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Citations
15 Claims
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1. An acoustic device, comprising:
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a first coupled resonator filter (CRF) and a second CRF electrically coupled to one another, wherein each of the first CRF and the second CRF has an input port, an output port, a bottom film bulk acoustic resonator (FBAR), an acoustic decoupler formed on the bottom FBAR, and a top FBAR formed on the acoustic decoupler, wherein each of the bottom FBAR and the top FBAR has a bottom electrode, a piezoelectric layer formed on the bottom electrode, and a top electrode formed on the piezoelectric layer, and wherein the input and output ports of each CRF are electrically connected to first and second corresponding electrodes, respectively, such that the acoustic decoupler is located between the first and the second corresponding electrodes; and wherein the output port of the first CRF is electrically connected to the input port of the second CRF. - View Dependent Claims (2, 3, 4, 5, 6, 7)
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8. An acoustic device, comprising:
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a first coupled resonator filter (CRF), a second CRF electrically coupled to the first CRF, and a compensating capacitor electrically coupled to the second CRF, wherein each of the first CRF and the second CRF has a bottom FBAR, an acoustic decoupler formed on the bottom FBAR, and a top FBAR formed on the acoustic decoupler, wherein each of the bottom FBAR and the top FBAR has a bottom electrode, a piezoelectric layer formed on the bottom electrode, and a top electrode formed on the piezoelectric layer; wherein the first CRF has an input port and an output port electrically connected to first and second corresponding electrodes of the first CRF, respectively, such that the acoustic decoupler of the first CRF is located between the first and the second corresponding electrodes; wherein the second CRF has an input port, a first output port and a second output port electrically connected to first, second and third corresponding electrodes of the second CRF, respectively, such that the acoustic decoupler of the second CRF is located between the first corresponding electrode and both the second and third corresponding electrodes; and wherein the output port of the first CRF is eclectically connected to the input port of the second CRF. - View Dependent Claims (9, 10, 11, 12, 13, 14, 15)
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Specification