Phase And Frequency Control Of A Radio Frequency Generator From An External Source
First Claim
Patent Images
1. A radio frequency (RF) generator comprising:
- a RF power source;
a sensor coupled to the RF power source;
a sensor signal processing unit coupled to the power source and to the sensor, the sensor signal processing unit receiving a control input from an external RF generator and to generate a control signal to control at least one of phase or frequency of the RF generator.
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Abstract
Controlling a phase and/or a frequency of a RF generator. The RF generator includes a power source, a sensor, and a sensor signal processing unit. The sensor signal processing unit is coupled to the power source and to the sensor. The sensor signal processing unit controls the phase and/or the frequency of a RF generator.
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Citations
7 Claims
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1. A radio frequency (RF) generator comprising:
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a RF power source; a sensor coupled to the RF power source; a sensor signal processing unit coupled to the power source and to the sensor, the sensor signal processing unit receiving a control input from an external RF generator and to generate a control signal to control at least one of phase or frequency of the RF generator. - View Dependent Claims (2, 3, 4, 5, 6)
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7. A radio frequency (RF) generator comprising:
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means for generating RF power; sensor means coupled to the power source; and a sensor signal processing means coupled to the means for generating RF power the sensor means, the sensor signal processing means adapted to receive an input from an external RF generator means and to generate a control signal to control at least one of phase or frequency of the RF generator.
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Specification