FLUID SENSOR PREVENTING GENERATION OF AIR BUBBLES

• US 20120015451A1
• Filed: 03/01/2011
• Published: 01/19/2012
• Est. Priority Date: 07/13/2010
• Status: Active Grant

• Current Assignee: Samsung Electronics Co. Ltd.
• Original Assignee: Samsung Electronics Co. Ltd.
• Inventors: LEE, Hun Joo, LEE, Soo Suk, LEE, Jung Nam
• Granted Patent: US 8,968,674 B2
• Time in Patent Office: Days
• US Class Current: 436/518
• CPC Class Codes: G01N 29/022 Fluid sensors based on microsensors, e.g. quartz crystal-microbalance [QCM], surface acoustic wave [SAW] devices, tuning forks, cantilevers, flexural plate wave [FPW] devices microdevices per se B81B
• CPC Class Codes: G01N 29/222 Constructional or flow details for analysing fluids optoacoustic fluid cells G01N29/2425
• CPC Class Codes: Y10S 436/807 Apparatus included in process claim, e.g. physical support structures
• CPC Class Codes: Y10T 29/49826 Assembling or joining

Abstract

Provided herein is a fluid sensor, which includes a closed reaction unit in which reaction of a fluid sample takes place. The reaction unit is tapered on a side through which the fluid is injected so as to prevent generation of air bubbles during the injection of the fluid. Thus, the sensor has improved sensitivity.

Claims

1. A fluid sensor comprising:

a main body comprising;

an underlying substrate and a top plate disposed thereon,

a reaction unit including an inner space of the main body in which reaction of a fluid sample takes place,

an inlet disposed on a first side of the top plate, and through which the fluid sample is injected into the reaction unit; and

an outlet disposed on a second side of the top plate, and through which the fluid sample is exhausted from the reaction unit,

wherein a side cross-section of a region of the reaction unit including the inlet includes a slope tapered at a positive angle (α

).

2. The sensor of claim 1, wherein the angle (α

) of the slope is less than a contact angle of the substrate.

3. The sensor of claim 2, wherein a top of the slope is rounded or flat.

4. The sensor of claim 1, wherein a vertical cross-section of the reaction unit is formed in a quadrilateral shape, a rounded shape or a flat shape inwardly tapered on both sides.

5. The sensor of claim 4, wherein an inwardly tapered angle (β

) is less than a contact angle of the substrate.

6. The sensor of claim 1, wherein a horizontal cross-section of the reaction unit including the slope is formed in a quadrilateral shape, a rounded shape or a flat shape inwardly tapered on both sides.

7. The sensor of claim 6, wherein an inwardly tapered angle (β

) is less than a contact angle of the substrate.

8. The sensor of claim 1, further comprising a receptor specifically reacting with a target material in the fluid sample, the receptor immobilized on at least a portion of a substrate area in the reaction unit.

9. The sensor of claim 1, wherein a lower side of the inlet is in contact with or adjacent to the substrate.

10. The sensor of claim 1, wherein a lower side of the outlet is disposed on the top plate.

11. The sensor of claim 1, wherein a side cross-section of a region of the reaction unit including the outlet includes a slope tapered at a positive angle (θ

).

12. The sensor of claim 1, wherein the sensor is one of a surface plasmon resonance sensor, a quartz crystal microbalance sensor, a cantilever sensor, a surface acoustic wave sensor and a bulk acoustic wave sensor.

13. A method of manufacturing a fluid sensor, the method comprising:

forming a main body and a reaction unit by;

disposing a top plate on an underlying substrate, wherein the reaction unit includes an inner space of the main body in which a reaction of a fluid sample takes place;

disposing an inlet on a first side of the top plate through which the fluid sample is injected into the reaction unit, wherein a side cross-section of a region of the reaction unit including the inlet includes a slope tapered at a positive angle (α

); and

disposing an outlet on a second side of the top plate through which the fluid sample is exhausted from the reaction unit.

14. The method of claim 13,

further comprising forming the angle (α

) of the slope at an angle that is less than a contact angle of the substrate; and

wherein a top of the slope is rounded or flat.

15. The method of claim 13, further comprising forming a vertical cross-section of the reaction unit in a quadrilateral shape, a rounded shape or a flat shape inwardly tapered on both sides and forming an inwardly tapered angle (β

) at an angle which is less than a contact angle of the substrate.

16. The method of claim 13, further comprising forming a horizontal cross-section of the reaction unit including the slope in a quadrilateral shape, a rounded shape or a flat shape inwardly tapered on both sides and forming an inwardly tapered angle (β

) at an angle which is less than a contact angle of the substrate.

17. The method of claim 13, further comprising

placing a receptor on the substrate, wherein the receptor specifically reacts with a target material in the fluid sample;

and

immobilizing the receptor on at least a portion of a substrate area in the reaction unit.

18. The method of claim 13, further comprising

placing a lower side of the inlet in contact with or adjacent to the substrate, and

disposing a lower side of the outlet on the top plate,

wherein a side cross-section of a region of the reaction unit including the outlet includes a slope tapered at a positive angle (θ

).

19. The method of claim 13, wherein the sensor is one of a surface plasmon resonance sensor, a quartz crystal microbalance sensor, a cantilever sensor, a surface acoustic wave sensor and a bulk acoustic wave sensor.

20. A method of using a fluid sensor, the method comprising:

injecting a fluid sample into a reaction unit via an inlet disposed on a first top plate side,

the sensor comprising a main body comprising an underlying substrate and a top plate disposed thereon, and

the reaction unit comprising a main body inner space in which a fluid sample reaction takes place,

wherein a side cross-section of a region of the reaction unit including the inlet includes a slope tapered at a positive angle (α

); and

exhausting the fluid sample from the reaction unit via an outlet disposed on a second top plate side.