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Method for Detecting Accelerations and Rotation Rates, and Mems Sensor

  • US 20120017678A1
  • Filed: 02/22/2010
  • Published: 01/26/2012
  • Est. Priority Date: 03/31/2009
  • Status: Active Grant
First Claim
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1. Method for detecting accelerations along, and rotation rates about, at least one, preferably two of three mutually perpendicular spatial axes x, y and z by means of a MEMS sensor (1), whereinat least one driving mass (6;

  • 6.1, 6.2) and at least one sensing mass (5) are moveably arranged on a substrate (2) and the at least one driving mass (6;

    6.1, 6.2) is moved relative to the at least one sensing mass (5) in oscillation at a driving frequency andwhen an external acceleration of the sensor occurs, driving mass/es (6;

    6.1, 6.2) and sensing mass/es (5) are deflected at an acceleration frequency and, when an external rotation rate of the sensor (1) occurs, are deflected at a rotation rate frequency, andthe acceleration frequency and rotation rate frequency are different.

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