Method for Detecting Accelerations and Rotation Rates, and Mems Sensor

• US 20120017678A1
• Filed: 02/22/2010
• Published: 01/26/2012
• Est. Priority Date: 03/31/2009
• Status: Active Grant

• Current Assignee: Hanking Electronics Hongkong Company Limited
• Original Assignee: Maxim Integrated Products, Inc. (Analog Devices, Inc.)
• Inventors: Rocchi, Alessandro
• Granted Patent: US 9,134,128 B2
• Time in Patent Office: Days
• US Class Current: 73/504.12
• CPC Class Codes: G01C 19/574 the devices having two sensing masses in anti-phase motion
• CPC Class Codes: G01C 19/5747 each sensing mass being connected to a driving mass, e.g. driving frames
• CPC Class Codes: G01C 19/5755 the devices having a single sensing mass
• CPC Class Codes: G01C 19/5762 the sensing mass being connected to a driving mass, e.g. driving frames
• CPC Class Codes: G01P 15/097 by vibratory elements
• CPC Class Codes: G01P 15/14 by making use of gyroscopes gyroscopes per se G01C19/00
• CPC Class Codes: G01P 15/18 in two or more dimensions

Abstract

The invention concerns a MEMS sensor and a method for detecting accelerations along, and rotation rates about, at least one, preferably two of three mutually perpendicular spatial axes x, y and z by means of a MEMS sensor (1), wherein at least one driving mass (6; 6.1, 6.2) and at least one sensor mass (5) are moveably arranged on a substrate (2) and the at least one driving mass (6; 6.1, 6.2) is moved relative to the at least one sensor mass (5) in oscillation at a driving frequency and when an external acceleration of the sensor occurs, driving mass/es (6; 6.1, 6.2) and sensor mass/es (5) are deflected at an acceleration frequency and, when an external rotation rate of the sensor (1) occurs, are deflected at a rotation rate frequency, and the acceleration frequency and rotation rate frequency are different. At the MEMS-sensor the driving mass/es (6; 6.1, 6.2) and sensor mass/es (5) are arranged on the substrate (2), and are balanced in the resting state by means of at least one of the anchors (3). In the driving mode the driving mass/es (6; 6.1, 6.2), when vibrating in oscillation about this at least one anchor (3), generate/s an imbalance of the driving mass/es (6; 6.1, 6.2) and the sensor mass/es (5) with respect to this at least one anchor (3), and the sensor elements detect deflections of the driving and sensor masses, due to torques and Coholis forces generated, with an acceleration frequency and/or a rotation rate frequency.

Claims

1. Method for detecting accelerations along, and rotation rates about, at least one, preferably two of three mutually perpendicular spatial axes x, y and z by means of a MEMS sensor (1), wherein

at least one driving mass (6;

6.1, 6.2) and at least one sensing mass (5) are moveably arranged on a substrate (2) and the at least one driving mass (6;

6.1, 6.2) is moved relative to the at least one sensing mass (5) in oscillation at a driving frequency and

when an external acceleration of the sensor occurs, driving mass/es (6;

6.1, 6.2) and sensing mass/es (5) are deflected at an acceleration frequency and, when an external rotation rate of the sensor (1) occurs, are deflected at a rotation rate frequency, and

the acceleration frequency and rotation rate frequency are different.

2-16. -16. (canceled)