ELECTROSTATIC CAPACITIVE PRESSURE SENSOR
First Claim
1. An electrostatic capacitive pressure sensor comprising a pressure sensor chip for detecting an electrostatic capacitance in accordance with the pressure of a medium being measured, wherein:
- one face of a sensor diaphragm of the pressure sensor is a pressure introduction chamber side for introducing the medium to be measured, and the other face is a capacitor chamber side for forming a capacitor portion; and
the sensor diaphragm is of less rigidity toward the center portion from the peripheral edge portion that is a boundary with a diaphragm securing portion of the capacitor chamber side and the peripheral edge portion or the center portion of the sensor diaphragm flexes to the pressure introduction chamber side, and the other flexes to the capacitor chamber side, in accordance with a deposition of a component of a medium to be measured onto a surface of the sensor diaphragm that contacts the medium to be measured.
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Accused Products
Abstract
In an electrostatic capacitance pressure sensor provided with a pressure sensor chip of a diaphragm structure for detecting an electrostatic capacitance in accordance with a pressure of a medium to be measured, one face of a sensor diaphragm of the pressure sensor is a pressure introduction chamber side wherein the medium to be measured is introduced, and the other face is a capacitor chamber side wherein a capacitor portion is formed, where, in the sensor diaphragm, the rigidity is lower towards a center portion from a peripheral edge portion that is a boundary of diaphragm securing portions on the capacitor chamber side.
23 Citations
11 Claims
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1. An electrostatic capacitive pressure sensor comprising a pressure sensor chip for detecting an electrostatic capacitance in accordance with the pressure of a medium being measured, wherein:
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one face of a sensor diaphragm of the pressure sensor is a pressure introduction chamber side for introducing the medium to be measured, and the other face is a capacitor chamber side for forming a capacitor portion; and the sensor diaphragm is of less rigidity toward the center portion from the peripheral edge portion that is a boundary with a diaphragm securing portion of the capacitor chamber side and the peripheral edge portion or the center portion of the sensor diaphragm flexes to the pressure introduction chamber side, and the other flexes to the capacitor chamber side, in accordance with a deposition of a component of a medium to be measured onto a surface of the sensor diaphragm that contacts the medium to be measured. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11)
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Specification