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MEMS-TYPE PRESSURE PULSE GENERATOR

  • US 20120018244A1
  • Filed: 07/18/2011
  • Published: 01/26/2012
  • Est. Priority Date: 07/22/2010
  • Status: Active Grant
First Claim
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1. A device, of the MEMS and/or NEMS type, or of the cMUT type, for generating acoustic energy, including:

  • at least one first deformable cavity, made in a at least a first layer or a first substrate, extending in a plane xy, called the plane of the device, said first deformable cavity being delimited by at least one side mobile or deformable wall, and at least one opening, for transmitting at least one pressure or depression or partial vacuum pulse, produced in the first cavity, to an ambient atmosphere,an actuator to generate a displacement or deformation, in the plane of the sensor, of said mobile or deformable wall or membrane.

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