MEMS-TYPE PRESSURE PULSE GENERATOR
First Claim
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1. A device, of the MEMS and/or NEMS type, or of the cMUT type, for generating acoustic energy, including:
- at least one first deformable cavity, made in a at least a first layer or a first substrate, extending in a plane xy, called the plane of the device, said first deformable cavity being delimited by at least one side mobile or deformable wall, and at least one opening, for transmitting at least one pressure or depression or partial vacuum pulse, produced in the first cavity, to an ambient atmosphere,an actuator to generate a displacement or deformation, in the plane of the sensor, of said mobile or deformable wall or membrane.
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Abstract
The invention relates to a device for generating or recovering acoustic energy, including:
- at least one first deformable cavity (20) for receiving an ambient atmosphere, made in a first substrate, delimited by at least one wall including at least one mobile or deformable wall (25), and a means for making the cavity communicate with an ambient atmosphere,
- a means (24, 24′, 241, 24′1) for actuating a displacement or deformation, in the plane of the sensor, or to recover energy resulting from a displacement or deformation, in the plane of the sensor, of said mobile or deformable wall.
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Citations
28 Claims
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1. A device, of the MEMS and/or NEMS type, or of the cMUT type, for generating acoustic energy, including:
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at least one first deformable cavity, made in a at least a first layer or a first substrate, extending in a plane xy, called the plane of the device, said first deformable cavity being delimited by at least one side mobile or deformable wall, and at least one opening, for transmitting at least one pressure or depression or partial vacuum pulse, produced in the first cavity, to an ambient atmosphere, an actuator to generate a displacement or deformation, in the plane of the sensor, of said mobile or deformable wall or membrane. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12)
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13. A method for making a device, for example of the MEMS and/or NEMS or cMUT type, for generating acoustic energy, including, in the following or another order:
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the production, in at least a first layer or a first substrate, extending in a plane xy, called plane of the device, of at least one first deformable cavity for receiving an ambient atmosphere, delimited by at least one mobile or deformable side wall, the production of an actuator of said mobile or deformable side wall in the plane of the device, the production of said at least one opening, making the first cavity communicate with an ambient atmosphere. - View Dependent Claims (14, 15, 16, 17, 18)
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19. A device, of the MEMS and/or NEMS type, or of the cMUT type, for generating acoustic energy, including:
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at least one first deformable cavity, made in a at least a first layer or a first substrate, extending in a plane xy, called the plane of the device, said first deformable cavity being delimited by at least one side mobile or deformable wall, and a means, for transmitting at least one pressure or depression or partial vacuum pulse, produced in the first cavity, to an ambient atmosphere, a means for actuating a displacement or deformation, in the plane of the sensor, of said mobile or deformable wall or membrane. - View Dependent Claims (20, 21, 22, 23, 24, 25, 26, 27, 28)
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Specification