Structure And Method For Dual Work Function Metal Gate CMOS With Selective Capping
First Claim
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1. A device comprising:
- an NMOS transistor with a first gate dielectric, first mid-gap metal gate, and a first cap layer, wherein the first cap layer comprises a material having a high oxygen affinity and low work function; and
a PMOS transistor with a second gate dielectric, second mid-gate metal gate and a second cap layer, wherein the second cap layer comprises a material having a low oxygen affinity and high work function.
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Abstract
A CMOS device having an NMOS transistor with a metal gate electrode comprising a mid-gap metal with a low work function/high oxygen affinity cap and a PMOS transistor with a metal gate electrode comprising a mid gap metal with a high work function/low oxygen affinity cap and method of forming.
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Citations
19 Claims
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1. A device comprising:
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an NMOS transistor with a first gate dielectric, first mid-gap metal gate, and a first cap layer, wherein the first cap layer comprises a material having a high oxygen affinity and low work function; and a PMOS transistor with a second gate dielectric, second mid-gate metal gate and a second cap layer, wherein the second cap layer comprises a material having a low oxygen affinity and high work function. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9)
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10. A method of forming a device, comprising the steps of:
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providing a semiconductor body having a NMOS gate stack, a PMOS gate stack, and an oxide layer formed thereon, wherein the NMOS gate stack comprises a first gate dielectric, a first mid-gap metal gate, and a first dummy poly layer and the PMOS gate stack comprises a second gate dielectric, a second mid-gap metal gate, and a second dummy poly layer; removing the first dummy poly; forming a first cap layer over the first mid-gap metal gate, the first cap layer comprising a high oxygen affinity and low work function material; removing the second dummy poly; forming a second cap layer over the second mid-gap metal gate, the second cap layer comprising a low oxygen affinity and high work function material; after removing the second dummy poly and prior to forming the second cap layer, performing a low temperature oxidation to incorporate oxygen into the second mid-gap metal gate; and annealing to incorporate low work function material from the first cap layer into the first mid-gap metal gate at the interface between the first mid-gap metal gate and the first gate dielectric. - View Dependent Claims (11, 12, 13, 14, 15, 16)
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17. A method of forming a device, comprising the steps of:
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providing a semiconductor body having a NMOS gate stack, a PMOS gate stack, and an oxide layer formed thereon, wherein the NMOS gate stack comprises a first gate dielectric, a first mid-gap metal gate, and a first dummy poly layer and the PMOS gate stack comprises a second gate dielectric, a second mid-gap metal gate, and a second dummy poly layer; removing the first dummy poly layer and the second dummy poly layer; performing a low temperature oxidation to incorporate oxygen into the first mid-gate metal gate and the second mid-gap metal gate; depositing a first cap layer over the NMOS gate stack and the PMOS gate stack; removing the first cap layer from one of the NMOS gate stack and PMOS gate stack; depositing a second cap layer over both the NMOS gate stack and the PMOS gate stack, wherein one of the first cap layer and the second cap layer comprise a low oxygen affinity and high work function material and the other comprises a high oxygen affinity and low work function material such that oxygen is scavenged from the first mid-gap metal gate; and after depositing the second cap layer, annealing the device to incorporate low work function material into the first mid-gap metal gate at an interface between the first mid-gap metal gate and the first gate dielectric. - View Dependent Claims (18, 19)
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Specification