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Structure And Method For Dual Work Function Metal Gate CMOS With Selective Capping

  • US 20120018810A1
  • Filed: 01/13/2011
  • Published: 01/26/2012
  • Est. Priority Date: 01/13/2010
  • Status: Active Grant
First Claim
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1. A device comprising:

  • an NMOS transistor with a first gate dielectric, first mid-gap metal gate, and a first cap layer, wherein the first cap layer comprises a material having a high oxygen affinity and low work function; and

    a PMOS transistor with a second gate dielectric, second mid-gate metal gate and a second cap layer, wherein the second cap layer comprises a material having a low oxygen affinity and high work function.

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