INSTALLATION OF OPTICAL INSPECTION OF ELECTRONIC CIRCUITS
First Claim
1. An installation of optical inspection of integrated circuits or the like, comprising:
- a planar conveyor (1) along a first direction (X) of the objects to be analyzed;
a photographic system (2) placed above an area of the conveyor and in a fixed position with respect thereto, the photographic system comprising at least one first set (2) of digital cameras (22) each comprising an orthogonal array of pixels, said cameras being aligned in a second direction (Y, Y′
) different from the first one, the cameras being all oriented so that one of the orthogonal directions of their pixel array forms a first angle (α
) with the first direction.
1 Assignment
0 Petitions
Accused Products
Abstract
An installation of optical inspection of integrated circuits or the like, comprising: a planar conveyor along a first direction of the objects to be analyzed and a photographic system placed above an area of the conveyor and in a fixed position with respect thereto, the photographic system comprising at least one first set of digital cameras each comprising an orthogonal array of pixels, said cameras being aligned in a second direction different from the first one, the cameras being all oriented so that one of the orthogonal directions of their pixel array forms a first angle with the first direction.
33 Citations
8 Claims
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1. An installation of optical inspection of integrated circuits or the like, comprising:
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a planar conveyor (1) along a first direction (X) of the objects to be analyzed; a photographic system (2) placed above an area of the conveyor and in a fixed position with respect thereto, the photographic system comprising at least one first set (2) of digital cameras (22) each comprising an orthogonal array of pixels, said cameras being aligned in a second direction (Y, Y′
) different from the first one, the cameras being all oriented so that one of the orthogonal directions of their pixel array forms a first angle (α
) with the first direction. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8)
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Specification