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MICRO GYROSCOPE FOR DETERMINING ROTATIONAL MOVEMENTS ABOUT THREE SPATIAL AXES WHICH ARE PERPENDICULAR TO ONE ANOTHER

  • US 20120024056A1
  • Filed: 03/08/2010
  • Published: 02/02/2012
  • Est. Priority Date: 03/26/2009
  • Status: Active Grant
First Claim
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1. Micro gyroscope for determining rotational movements about three perpendicularly stacked spatial axes x, y and z,with a substrate (1) on which several tangentially oscillating masses (2, 3) are arranged about the perpendicularly positioned z axis on the substrate (1), whereby the oscillating masses (2, 3) are fastened to the substrate (1) with springs (5, 6, 8) and tie bolts (7, 9),and have drive elements (11) for maintaining the oscillating tangential vibrations of the masses (2, 3) about the z axis, as a result of which the masses (2, 3) are subject to Coriolis forces and the deflections caused by them when the substrate (1) rotates around any spatial axis, andwith sensor elements for registering the deflection of the masses (2, 3) owing to the generated Coriolis forces,characterized in thatsome of the masses (2, 3) oscillating about the z axis are essentially tiltably arranged about the x axis that runs parallel to the substrate (1),that other masses (2, 3) oscillating about the z axis are essentially tiltably arranged about the y axis that runs parallel to the substrate (1),that, in turn, at least one of the oscillating masses (2, 3) can be also be deflected at least partially radially with respect to the z axis in the x-y plane parallel to the plane of the substrate (1), andthat this z mass (3) that can be additionally deflected radially is also allocated to an oscillating sensor element (12) that can also be deflected radially with regard to the z axis but not about the z axis.

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