MICRO GYROSCOPE FOR DETERMINING ROTATIONAL MOVEMENTS ABOUT THREE SPATIAL AXES WHICH ARE PERPENDICULAR TO ONE ANOTHER

• US 20120024056A1
• Filed: 03/08/2010
• Published: 02/02/2012
• Est. Priority Date: 03/26/2009
• Status: Active Grant

• Current Assignee: Hanking Electronics Hongkong Company Limited
• Original Assignee: Maxim Integrated Products, Inc. (Analog Devices, Inc.)
• Inventors: Hammer, Hanno
• Granted Patent: US 8,776,599 B2
• Time in Patent Office: Days
• US Class Current: 73/504.02
• CPC Class Codes: G01C 19/5712 the devices involving a micromechanical structure

Abstract

A micro gyroscope for determining rotational movements about three spatial axes x, y and z, which are perpendicular to one another has a substrate (1) on which a plurality of masses (2, 3) oscillating tangentially about the z axis, which is perpendicular to the substrate (1), are arranged. The oscillating masses (2, 3) are fastened on the substrate (1) by means of springs (5, 6, 8) and the bolts (7, 9). Driving elements (11) serve to maintain oscillating tangential vibrations of the masses (2, 3) about the z axis as a result of which, upon rotation of the substrate (1) about any spatial axis, the masses (2, 3) are subjected to Corolis forces and deflections caused as a result. Sensor elements detect the deflections of the masses (2, 3) on the basis of the Corolis forces generated. Some of the masses (2, 3) oscillating about the z axis are mounted in a tiltable manner substantially about the x axis which runs parallel to the substrate (1). Others of the masses (2, 3) oscillating about the z axis are mountable in a tiltable manner substantially about the y axis, which likewise runs parallel to the substrate (1). At least one other of the oscillating masses (2, 3) can be additionally at least partially deflected substantially radially to the z axis in the x-y plane parallel to the plane of the substrate (1). Said additionally radially deflectable z mass (3) is assigned a sensor element (12) which can likewise be deflected radially with respect to the axis but does not oscillate about the z axis.

Claims

1. Micro gyroscope for determining rotational movements about three perpendicularly stacked spatial axes x, y and z,

with a substrate (1) on which several tangentially oscillating masses (2, 3) are arranged about the perpendicularly positioned z axis on the substrate (1), whereby the oscillating masses (2, 3) are fastened to the substrate (1) with springs (5, 6, 8) and tie bolts (7, 9),

and have drive elements (11) for maintaining the oscillating tangential vibrations of the masses (2, 3) about the z axis, as a result of which the masses (2, 3) are subject to Coriolis forces and the deflections caused by them when the substrate (1) rotates around any spatial axis, and

with sensor elements for registering the deflection of the masses (2, 3) owing to the generated Coriolis forces,

characterized in that

some of the masses (2, 3) oscillating about the z axis are essentially tiltably arranged about the x axis that runs parallel to the substrate (1),

that other masses (2, 3) oscillating about the z axis are essentially tiltably arranged about the y axis that runs parallel to the substrate (1),

that, in turn, at least one of the oscillating masses (2, 3) can be also be deflected at least partially radially with respect to the z axis in the x-y plane parallel to the plane of the substrate (1), and

that this z mass (3) that can be additionally deflected radially is also allocated to an oscillating sensor element (12) that can also be deflected radially with regard to the z axis but not about the z axis.

2-24. -24. (canceled)