Yaw rate sensor and method for manufacturing a mass element
First Claim
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1. A yaw rate sensor comprising:
- a drive device;
at least one mass element which is connected to the drive device, the mass element including a base layer and at least one web which is situated on the base layer; and
at least one detection electrode for detecting a motion of the mass element.
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Abstract
A yaw rate sensor includes a drive device, at least one mass element which is connected to the drive device, and at least one detection electrode for detecting a motion of the mass element. The mass element has a base layer and at least one web which is situated on the base layer. Also, a method for manufacturing a mass element.
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Citations
10 Claims
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1. A yaw rate sensor comprising:
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a drive device; at least one mass element which is connected to the drive device, the mass element including a base layer and at least one web which is situated on the base layer; and at least one detection electrode for detecting a motion of the mass element. - View Dependent Claims (2, 3, 4, 5)
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6. A method for manufacturing a mass element, comprising:
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depositing a base layer on a substrate; depositing an oxide layer on the base layer; opening the oxide layer in predetermined regions; and depositing a web layer, the web layer connecting to the base layer in the opened regions so that a web is formed on the base layer. - View Dependent Claims (7, 8, 9, 10)
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Specification