PHASE CHANGE RANDOM ACCESS MEMORY AND METHOD FOR FABRICATING THE SAME

• US 20120025162A1
• Filed: 12/22/2010
• Published: 02/02/2012
• Est. Priority Date: 07/30/2010
• Status: Abandoned Application

• Current Assignee: Hynix Semiconductor Incorporated (SK Hynix Inc.)
• Original Assignee: Hynix Semiconductor Incorporated (SK Hynix Inc.)
• Inventors: SHIN, Hee Seung, Han, Ky-Hyun
• Application Number:
  US12/975,976
• Publication Number:
  US 20120025162A1
• Time in Patent Office: Days
• US Class Current: 257/3
• CPC Class Codes: H10B 63/20 comprising selection components having two electrodes, e.g. diodes
• CPC Class Codes: H10N 70/066 by filling of openings, e.g. damascene method
• CPC Class Codes: H10N 70/231 based on solid-state phase change, e.g. between amorphous and crystalline phases, Ovshinsky effect
• CPC Class Codes: H10N 70/826 adapted for essentially vertical current flow, e.g. sandwich or pillar type devices
• CPC Class Codes: H10N 70/8413 adapted for resistive heating

Abstract

A method for fabricating a PCRAM includes forming a switching element on a semiconductor substrate, forming an interlayer dielectric layer of a multilayer-structure by sequentially stacking a plurality of material layers having different etching properties on the semiconductor substrate having the switching element formed thereon, and by patterning the plurality of material layers to have different lengths or different side shapes, forming a heating electrode on sidewalls of the interlayer dielectric layer and an upper surface of the switching element, and forming a phase change material layer to fill a space inside of the heating electrode.

Claims

1. A method for fabricating a phase change random access memory (PCRAM), comprising:

forming a switching element on a semiconductor substrate;

forming an interlayer dielectric layer of a multilayer-structure by sequentially stacking a plurality of material layers having different etching properties on the semiconductor substrate having the switching element formed thereon, and by patterning the plurality of material layers to have different lengths or different side shapes;

forming a heating electrode on sidewalls of the interlayer dielectric layer and an upper surface of the switching element; and

forming a phase change material layer to fill a space inside of the heating electrode.

2. The method according to claim 1, wherein the forming of the interlayer dielectric layer comprises:

alternately depositing the plurality of material layers on the semiconductor substrate having the switching element formed thereon;

forming a plurality of interlayer dielectric patterns having a heating electrode contact hole exposing the switching element by performing a first etching process on the plurality of material layers; and

performing a second etching process to form the interlayer dielectric layer such that the heating electrode contact hole has a raised and grooved side surface.

3. The method according to claim 1, wherein the forming of the heating electrode is performed by using a chemical vapor deposition (CVD) method or a deposition method using a TiCl₄ solution.

4. The method according to claim 1, wherein any one of the plurality of material layers comprises W, Ti, or a Ti-based metal material.

5. The method according to claim 4, wherein another of the plurality of material layers comprises silicon nitride.

6. The method according to claim 5, wherein another of the plurality of material layers comprises silicon oxide.

7. The method according to claim 5, wherein another of the plurality of material layers comprises silicon oxynitride.

8. The method according to claim 2, wherein, a CF₄ solution or CHF₃ solution is used to perform the first etching process.

9. The method according to claim 8, wherein, any one of a HF solution, buffered oxide etch (BOE), and a mixture of SiO₂ and SiN₂ is used to perform the second etching process.

10. The method according to claim 1, further comprising:

forming a bit line on the entire surface of the resultant structure having the phase change material layer formed therein, after the forming of the phase change material layer.

11. A PCRAM comprising:

a switching element formed on a semiconductor substrate;

an interlayer dielectric layer of a multilayer-structure formed on the semiconductor substrate, exposing the switching element, and having a raised and grooved side surface;

a heating electrode formed on sidewalls of the interlayer dielectric layer and an upper surface of the switching element; and

a phase change material layer formed to fill a space inside of the heating electrode.

12. The PCRAM according to claim 11, wherein the interlayer dielectric layer comprises:

first and fifth interlayer dielectric patterns formed on the uppermost and lowermost parts of the interlayer dielectric layer, respectively;

second and fourth interlayer dielectric patterns formed between the first and fifth interlayer dielectric patterns; and

a third interlayer dielectric pattern formed between the second and fourth interlayer dielectric patterns.

13. The PCRAM according to claim 12, wherein the first, third, and fifth interlayer dielectric patterns are formed to have the same length.

14. The PCRAM according to claim 13, wherein the second and fourth interlayer dielectric patterns have a smaller length than the first, third, and fifth interlayer dielectric patterns.

15. The PCRAM according to claim 12, wherein the second and fourth interlayer dielectric patterns have a different side shape from the first, third, and fifth interlayer dielectric patterns.

16. The PCRAM according to claim 12, further comprising:

a bit line formed over the semiconductor substrate having the phase change material layer formed therein.