ACOUSTIC PRESSURE TRANSDUCER
First Claim
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1. An apparatus, comprising:
- a flexure layer defining a plate and a first hinge portion and a second hinge portion, the flexure layer also defining a flexible portion extending away from the plate and configured to exhibit a varying electrical characteristic responsive to an acoustic pressure.
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Abstract
Acoustic transducer means are provided. A monolithic semiconductor layer defines a plate, a pair of oppositely disposed torsional hinges, a flexible extension and at least a portion of a support structure. Acoustic pressure communicated to the plate results in tensile strain of the flexible extension. The flexible extension provides a varying electrical characteristic responsive to the tensile strain. An electric signal corresponding to the acoustic pressure can be derived from the varying electrical characteristic of the flexible extension.
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Citations
16 Claims
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1. An apparatus, comprising:
a flexure layer defining a plate and a first hinge portion and a second hinge portion, the flexure layer also defining a flexible portion extending away from the plate and configured to exhibit a varying electrical characteristic responsive to an acoustic pressure. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10)
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11. A transducer, comprising:
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a flexure layer of monolithic material, the flexure layer defining a plate, the flexure layer also defining a first torsional hinge portion and a second torsional hinge portion extending away from opposite sides of the plate, the flexure layer also defining a flexible extension portion; a spine layer covering the plate of the flexure layer; and a membrane layer covering the spine layer, the flexible extension portion configured to exhibit an electrical characteristic varying in accordance with an acoustic pressure incident to the membrane layer. - View Dependent Claims (12, 13, 14, 15)
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16. A method, comprising:
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displacing a flexure layer of a transducer by influence of an acoustic pressure, the displacing including torsional strain of a pair of hinges and tensile strain of a flexible extension; varying an electrical characteristic of the flexible extension in accordance with the tensile strain; and deriving an electrical signal corresponding to the acoustic pressure using the varying electrical characteristic.
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Specification