TRANSPORT DEVICE HAVING A DEFLECTABLE SEALING FRAME
First Claim
1. A device for transporting a substrate (5) in an XY-plane between working areas (2, 3, 22) in a chamber (1) comprising:
- (a) transport means (4) being movable in the XY-direction between the working areas (2, 3, 22),(b) at least one sealing frame (6) being held in the transport means (4) in a manner deflectable in a Z-direction perpendicular with respect to the XY-plane, wherein the sealing frame (6) has a first and a second sealing surface (10, 11) opposing one another preferably in Z-direction for sealing a space of a working area (2, 3, 22) comprising a working station (15, 18, 30), and wherein the sealing frame (6) comprises a substrate support (7) for receiving a substrate (5), and(c) closure means (16, 21, 24) configured such that, by pressing against the first sealing surface of the deflectable sealing frame (6), it deflects the sealing frame (6) in the Z-direction perpendicular with respect to the XY-plane of the transport means until the second sealing surface of the deflectable sealing frame (6) contacts the chamber wall (32, 31) neighboring the working station (15, 18, 30), so that due to the contact of the opposing sealing surfaces (10, 11) with the closure means (16, 21, 24) as well as with the chamber wall (32, 31) the area inside the sealing frame (6) is sealed in a vacuum-tight manner in order to thus seal a space around a working station (15, 18, 30).
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Accused Products
Abstract
The invention describes a device for transporting a substrate (5) into a working area (2, 3, 22) which can be temporarily separated in a vacuum-tight manner, and a corresponding method. A transport means (4) transports a substrate (5) in the plane (XY) to a defined working area (2, 3, 22) of a chamber (1). The transport means (4) has a deflectable sealing frame (6) which can be moved in a Z-direction perpendicular with respect to the XY-plane. The sealing frame (6) has two opposing sealing surfaces (10, 11) in the Z-direction. By pressing a closure means (16, 21, 24) against a first sealing surface (10, 11) and thus pressing the second sealing surface (11, 10) against a chamber wall (32, 31), the space of the working area (2, 3, 22) of the chamber (1) can be sealed.
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Citations
17 Claims
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1. A device for transporting a substrate (5) in an XY-plane between working areas (2, 3, 22) in a chamber (1) comprising:
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(a) transport means (4) being movable in the XY-direction between the working areas (2, 3, 22), (b) at least one sealing frame (6) being held in the transport means (4) in a manner deflectable in a Z-direction perpendicular with respect to the XY-plane, wherein the sealing frame (6) has a first and a second sealing surface (10, 11) opposing one another preferably in Z-direction for sealing a space of a working area (2, 3, 22) comprising a working station (15, 18, 30), and wherein the sealing frame (6) comprises a substrate support (7) for receiving a substrate (5), and (c) closure means (16, 21, 24) configured such that, by pressing against the first sealing surface of the deflectable sealing frame (6), it deflects the sealing frame (6) in the Z-direction perpendicular with respect to the XY-plane of the transport means until the second sealing surface of the deflectable sealing frame (6) contacts the chamber wall (32, 31) neighboring the working station (15, 18, 30), so that due to the contact of the opposing sealing surfaces (10, 11) with the closure means (16, 21, 24) as well as with the chamber wall (32, 31) the area inside the sealing frame (6) is sealed in a vacuum-tight manner in order to thus seal a space around a working station (15, 18, 30). - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14, 15, 16, 17)
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Specification