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Method of Continuously Measuring Substrate Concentration

  • US 20120029332A1
  • Filed: 03/15/2010
  • Published: 02/02/2012
  • Est. Priority Date: 03/16/2009
  • Status: Abandoned Application
First Claim
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1. A method of continuously measuring a substrate concentration based on a response when a voltage is applied to a sensor, comprising:

  • a response voltage application step of applying a response voltage at which a response attributed to a substrate is obtained; and

    a non-response voltage application step of applying a non-response voltage at which the response attributed to the substrate is not obtained or is not substantially obtained.

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