×

MICROMECHANICAL SYSTEM

  • US 20120031183A1
  • Filed: 08/03/2011
  • Published: 02/09/2012
  • Est. Priority Date: 08/04/2010
  • Status: Active Grant
First Claim
Patent Images

1. A yaw-rate sensor for determining a Coriolis force, comprising:

  • a semiconductor substrate;

    a mass body mounted so it is movable over the semiconductor substrate;

    a drive unit for setting the mass body into an oscillating movement; and

    a detection unit for determining a deflection of the mass body caused by the Coriolis force, the detection unit including a piezoresistive element.

View all claims
  • 1 Assignment
Timeline View
Assignment View
    ×
    ×