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INERTIAL SENSOR AND METHOD FOR MANUFACTURING AN INERTIAL SENSOR

  • US 20120031186A1
  • Filed: 08/03/2011
  • Published: 02/09/2012
  • Est. Priority Date: 08/03/2010
  • Status: Active Grant
First Claim
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1. An inertial sensor, comprising:

  • a substrate;

    a mass element;

    a detecting device configured to detect a movement of the mass element relative to the substrate; and

    a spring device, the mass element being coupled to the substrate via the spring device,wherein the spring device has a T-shaped cross-sectional profile.

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