INERTIAL SENSOR AND METHOD FOR MANUFACTURING AN INERTIAL SENSOR
First Claim
Patent Images
1. An inertial sensor, comprising:
- a substrate;
a mass element;
a detecting device configured to detect a movement of the mass element relative to the substrate; and
a spring device, the mass element being coupled to the substrate via the spring device,wherein the spring device has a T-shaped cross-sectional profile.
1 Assignment
0 Petitions
Accused Products
Abstract
An inertial sensor includes a substrate, a mass element, and a detecting device for detecting a movement of the mass element relative to the substrate, the mass element being coupled to the substrate with the aid of a spring device, wherein the spring device has a T-shaped cross-sectional profile. A method for manufacturing an inertial sensor is also disclosed.
13 Citations
15 Claims
-
1. An inertial sensor, comprising:
-
a substrate; a mass element; a detecting device configured to detect a movement of the mass element relative to the substrate; and a spring device, the mass element being coupled to the substrate via the spring device, wherein the spring device has a T-shaped cross-sectional profile. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8)
-
-
9. A method of manufacturing an inertial sensor including a spring device having a T-shaped cross-sectional profile, the method comprising:
-
providing a substrate, a detecting device being situated on the substrate; depositing a first layer onto the substrate; structuring the first layer; depositing an oxide layer onto the structured first layer; depositing a second layer onto the oxide layer; and structuring the second layer to form a web which is situated perpendicularly on the first layer. - View Dependent Claims (10, 11, 12, 13, 14, 15)
-
Specification