SEMICONDUCTOR DEVICE AND METHOD OF PRODUCING SAME
First Claim
Patent Images
1. A semiconductor device, comprising:
- a conductive film formed on an insulating substrate;
a first wiring layer formed on the insulating substrate, having a greater thickness than the conductive film;
a planarizing layer disposed over the insulating substrate so as to cover the first wiring layer and the conductive film; and
an interlayer insulating film disposed on the planarizing layer,wherein the planarizing layer is made of an inorganic film, and has a recessed portion formed in a region in which the conductive film is disposed,wherein a first contact hole penetrating through at least the interlayer insulating film and reaching said first wiring layer is formed on the first wiring layer.wherein a second contact hole penetrating through at least the interlayer insulating film and reaching said conductive film is formed on the conductive film so as to run through an inside of the recessed portion, andwherein on the interlayer insulating film, a second wiring layer electrically connected to the conductive film through the second contact hole and a third wiring layer electrically connected to the first wiring layer through the first contact hole are formed.
1 Assignment
0 Petitions
Accused Products
Abstract
A semiconductor device has a planarizing layer that is made of an inorganic film, and has a recessed portion formed in a region thereof in which a conductive film is disposed. A first contact hole penetrating through at least an interlayer insulating film is formed on a first wiring layer, while a second contact hole penetrating through at least the interlayer insulating film is formed on the conductive film so as to run through the inside of the recessed portion.
-
Citations
12 Claims
-
1. A semiconductor device, comprising:
-
a conductive film formed on an insulating substrate; a first wiring layer formed on the insulating substrate, having a greater thickness than the conductive film; a planarizing layer disposed over the insulating substrate so as to cover the first wiring layer and the conductive film; and an interlayer insulating film disposed on the planarizing layer, wherein the planarizing layer is made of an inorganic film, and has a recessed portion formed in a region in which the conductive film is disposed, wherein a first contact hole penetrating through at least the interlayer insulating film and reaching said first wiring layer is formed on the first wiring layer. wherein a second contact hole penetrating through at least the interlayer insulating film and reaching said conductive film is formed on the conductive film so as to run through an inside of the recessed portion, and wherein on the interlayer insulating film, a second wiring layer electrically connected to the conductive film through the second contact hole and a third wiring layer electrically connected to the first wiring layer through the first contact hole are formed. - View Dependent Claims (2, 3, 4, 5, 6)
-
-
7. A method of manufacturing a semiconductor device, comprising:
-
forming a conductive film and a first wiring layer that is thicker than said conductive film on an insulating substrate; forming an inorganic film covering the first wiring layer and the conductive film over the insulating substrate; forming a photoresist film on a surface of the inorganic film; exposing the photoresist film to form a resist mask having an opening in a region in which the conductive film is formed; etching the resist mask and the inorganic film simultaneously to form a recessed portion in a surface of the inorganic film in a region that has been exposed by the opening, and to form a planarizing layer from the inorganic film by planarizing the surface of the inorganic film in a region that has been covered by the resist mask; forming an interlayer insulating film over the insulating substrate so as to cover the planarizing layer; forming, on the first wiring layer, a first contact hole penetrating through at least the interlayer insulating film and reaching said first wiring layer; forming, on the conductive film, a second contact hole penetrating through at least the interlayer insulating film and reaching said conductive film so as to run through an inside of the recessed portion; and on the interlayer insulating film, a second wiring layer electrically connected to the conductive film through the second contact hole, and a third wiring layer electrically connected to the first wiring layer through the first contact hole. - View Dependent Claims (8, 9, 10, 11, 12)
-
Specification