SENSOR SYSTEM AND METHOD FOR CALIBRATING A SENSOR SYSTEM
First Claim
1. A sensor system, comprising:
- a substrate, a mass movably suspended relative to the substrate; and
a detection arrangement to detect a deflection of the seismic mass relative to the substrate along a deflection direction, the detection arrangement including a first measuring electrode affixed to the substrate and a second measuring electrode affixed to the substrate, wherein a first overlap between the first measuring electrode and the seismic mass is larger than a second overlap between the second measuring electrode and the seismic mass.
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Accused Products
Abstract
A sensor system having a substrate and a mass which is movably suspended relative to the substrate is described, the sensor system including detection arrangement for detecting a deflection of the seismic mass relative to the substrate along a deflection direction, the detection arrangement including a first measuring electrode affixed to the substrate and a second measuring electrode affixed to the substrate, and a first overlap, which is perpendicular to the deflection direction, between the first measuring electrode and the seismic mass along the deflection direction is greater than a second overlap, which is perpendicular to the deflection direction, between the second measuring electrode and the seismic mass.
27 Citations
11 Claims
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1. A sensor system, comprising:
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a substrate, a mass movably suspended relative to the substrate; and a detection arrangement to detect a deflection of the seismic mass relative to the substrate along a deflection direction, the detection arrangement including a first measuring electrode affixed to the substrate and a second measuring electrode affixed to the substrate, wherein a first overlap between the first measuring electrode and the seismic mass is larger than a second overlap between the second measuring electrode and the seismic mass. - View Dependent Claims (2, 3, 4, 5, 6, 7)
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8. A method for calibrating a sensor system, the sensor system including a substrate, a mass movably suspended relative to the substrate, and a detection arrangement to detect a deflection of the seismic mass relative to the substrate along a deflection direction, the detection arrangement including a first measuring electrode affixed to the substrate and a second measuring electrode affixed to the substrate, wherein a first overlap between the first measuring electrode and the seismic mass is larger than a second overlap between the second measuring electrode and the seismic mass, the method comprising:
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measuring a first electrical capacitance between the first measuring electrode and the seismic mass in a first method step; measuring a second electrical capacitance between the second measuring electrode and the seismic mass in a second method step; ascertaining a calibration factor for the sensor system in a third method step as a function of the first and second electrical capacitances and also as a function of an overlap difference between the first overlap and the second overlap. - View Dependent Claims (9, 10, 11)
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Specification