Micromechanical Sensor
First Claim
1. A micromechanical sensor, comprising:
- a substrate;
at least one mass that is positioned on the substrate and moves relative to the substrate for detecting motions of the micromechanical sensor based on an acceleration force or Coriolis force, wherein the at least one mass and the substrate or a plurality of masses within the at least one mass that move toward one another are coupled by at least one bending spring for a relative rotational motion; and
wherein the at least one bending spring comprises a plurality of spring bars extending substantially parallel to one another for improving a linear spring characteristic of the at least one bending spring during the rotational motion, and at least one meander is incorporated on at least one of the plurality of spring bars.
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Accused Products
Abstract
A micromechanical sensor comprising a substrate (5) and at least one mass (6) which is situated on the substrate (5) and which moves relative to the substrate (5) is used to detect motions of the sensor based on an acceleration force and/or Coriolis force which occur(s). The mass (6) and the substrate (5) and/or two masses which move toward one another are connected by at least one bending spring device (1) for a relative rotational motion. The bending spring device (1) has multiple, in particular two, spring bars (2) extending essentially parallel to one another for improving the linear spring characteristic of the bending spring device during the rotational motion, and at least one meander (3) on at least one, preferably on all, of the spring bars (2).
17 Citations
14 Claims
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1. A micromechanical sensor, comprising:
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a substrate; at least one mass that is positioned on the substrate and moves relative to the substrate for detecting motions of the micromechanical sensor based on an acceleration force or Coriolis force, wherein the at least one mass and the substrate or a plurality of masses within the at least one mass that move toward one another are coupled by at least one bending spring for a relative rotational motion; and wherein the at least one bending spring comprises a plurality of spring bars extending substantially parallel to one another for improving a linear spring characteristic of the at least one bending spring during the rotational motion, and at least one meander is incorporated on at least one of the plurality of spring bars. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14)
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Specification